发明申请
- 专利标题: Piezoelectric element and method of manufacturing the same
- 专利标题(中): 压电元件及其制造方法
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申请号: US11058282申请日: 2005-02-16
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公开(公告)号: US20050179345A1公开(公告)日: 2005-08-18
- 发明人: Tetsu Miyoshi
- 申请人: Tetsu Miyoshi
- 专利权人: FUJI PHOTO FILM CO., LTD.
- 当前专利权人: FUJI PHOTO FILM CO., LTD.
- 优先权: JP2004-040829 20040218
- 主分类号: B06B1/06
- IPC分类号: B06B1/06 ; H01L41/083 ; H01L41/187 ; H01L41/22 ; H01L41/23 ; H01L41/273 ; H01L41/293 ; H01L41/297 ; H01L41/314 ; H02N2/00
摘要:
An array of piezoelectric elements is easily manufactured by making insulating portions at side surfaces smaller. The piezoelectric element includes: a multilayered structure in which piezoelectric material layers and internal electrode layers are alternately stacked; first insulating films formed by using an AD method, for covering a first group of internal electrode layers at a first surface of the multilayered structure; second insulating films formed by using the AD method, for covering a second group of internal electrode layers at a second surface of the multilayered structure; a first external electrode connected to the second group of internal electrode layers and insulated from the first group of internal electrode layers at the first surface; and a second external electrode connected to the first group of internal electrode layers and insulated from the second group of internal electrode layers at the second surface.
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