发明申请
US20050183666A1 Shower plate having projections and plasma CVD apparatus using same
有权
具有投影的淋浴板和使用其的等离子体CVD装置
- 专利标题： Shower plate having projections and plasma CVD apparatus using same
- 专利标题（中）： 具有投影的淋浴板和使用其的等离子体CVD装置
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申请号： US11061986申请日： 2005-02-18
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公开(公告)号： US20050183666A1公开(公告)日： 2005-08-25
- 发明人: Naoto Tsuji , Hideaki Fukuda , Hiroki Arai , Yoshinori Morisada , Tamihiro Kobayashi
- 申请人： Naoto Tsuji , Hideaki Fukuda , Hiroki Arai , Yoshinori Morisada , Tamihiro Kobayashi
- 申请人地址： JP Tokyo
- 专利权人： ASM JAPAN K.K.
- 当前专利权人： ASM JAPAN K.K.
- 当前专利权人地址： JP Tokyo
- 优先权： JP2004-044854 20040220
- 主分类号： H05H1/46
- IPC分类号： H05H1/46 ; C23C16/00 ; C23C16/34 ; C23C16/44 ; C23C16/455 ; C23C16/509 ; H01J37/32 ; H01L21/31
摘要：
A shower plate 122 has protrusions 22 formed on the front face used with a first electrode in a plasma CVD apparatus. A plane-surface portion 23 is left around apertures of gas inlet holes 21 formed in the shower plate 122. With protrusions 22 being formed, a surface area of the first electrode is increased.
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