发明申请
- 专利标题: Apparatus for manufacturing flat-panel display
- 专利标题(中): 用于制造平板显示器的装置
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申请号: US11064270申请日: 2005-02-23
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公开(公告)号: US20050183824A1公开(公告)日: 2005-08-25
- 发明人: Young Lee , Jun Choi , Saeng Jo , Byung-Oh Yoon , Gyeong-Hoon Kim , Hong-Gi Jeong
- 申请人: Young Lee , Jun Choi , Saeng Jo , Byung-Oh Yoon , Gyeong-Hoon Kim , Hong-Gi Jeong
- 专利权人: Advanced Display Process Engineering Co., Ltd.
- 当前专利权人: Advanced Display Process Engineering Co., Ltd.
- 优先权: KR10-2004-0012675 20040225; KR10-2004-0046667 20040622; KR10-2004-0047243 20040623; KR10-2004-0066006 20040820; KR10-2004-0069166 20040831; KR10-2004-0108225 20041217; KR10-2004-0111695 20041224
- 主分类号: C23F1/00
- IPC分类号: C23F1/00 ; G09F9/00 ; H01L21/00 ; H01L51/56
摘要:
An flat-panel display (FPD) manufacturing apparatus which has a configuration capable of easily processing large-size substrates while achieving easy manufacturing, transporting, operating, and repair processes.