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    Plasma processing apparatus
    2.
    发明申请
    Plasma processing apparatus 有权
    等离子体处理装置

    公开(公告)号：US20060137820A1

    公开(公告)日：2006-06-29

    申请号：US11313022

    申请日：2005-12-20

    申请人： Young Lee ,  Jun Choi ,  Saeng Jo ,  Young-Joo Hwang ,  Jong-Cheon Kim

    发明人： Young Lee ,  Jun Choi ,  Saeng Jo ,  Young-Joo Hwang ,  Jong-Cheon Kim

    IPC分类号： H01L21/306 ,  C23F1/00

    CPC分类号： H01L21/67069 ,  H01J37/3244 ,  H01J37/32522 ,  H01J37/32724

    摘要： A plasma processing apparatus for generating plasma in a chamber maintained in a vacuum state and processing a substrate using the plasma. The plasma processing apparatus includes a refrigerant channel for circulating a refrigerant formed in a shower head, thereby easily controlling the temperature of the shower head and improving the reproducibility of plasma treatment.

    摘要翻译： 一种等离子体处理装置，用于在保持真空状态的室中产生等离子体，并使用等离子体处理衬底。 等离子体处理装置包括用于使形成在喷淋头中的制冷剂循环的制冷剂通道，从而容易地控制淋浴头的温度并提高等离子体处理的再现性。

    Apparatus for manufacturing flat-panel display
    4.
    发明申请
    Apparatus for manufacturing flat-panel display 审中-公开
    用于制造平板显示器的装置

    公开(公告)号：US20050183665A1

    公开(公告)日：2005-08-25

    申请号：US11064150

    申请日：2005-02-23

    申请人： Young Lee ,  Jun Choi ,  Saeng Jo ,  Sung Ahn

    发明人： Young Lee ,  Jun Choi ,  Saeng Jo ,  Sung Ahn

    IPC分类号： C23C16/00 ,  G09B9/00 ,  H01L21/00

    CPC分类号： H01L21/67236 ,  H01L21/67196 ,  H01L21/67201

    摘要： A flat-panel display (FPD) manufacturing apparatus is disclosed which not only includes a load lock chamber, a feeding chamber, and a processing chamber, at least one of which has a vertically-stacked chamber structure to achieve an enhancement in substrate processing efficiency, but also includes a temporary substrate storing space for temporarily storing substrates in the feeding chamber to reduce the time taken to feed substrates. Another FPD manufacturing apparatus is disclosed which includes a load lock chamber, a feeding chamber connected to the load lock chamber, a temporary substrate storing space arranged at a predetermined portion of the feeding chamber, and at least one processing chamber connected to the feeding chamber.

    摘要翻译： 公开了一种平板显示器（FPD）制造装置，其不仅包括负载锁定室，馈送室和处理室，其中至少一个具有垂直堆叠的腔室结构，以实现衬底处理效率的提高 而且还包括用于在进料室中临时存储基板的临时基板存储空间，以减少进料基板所需的时间。 公开了另一种FPD制造装置，其包括负载锁定室，连接到负载锁定室的馈送室，布置在馈送室的预定部分处的临时衬底存储空间，以及连接到馈送室的至少一个处理室。

    Flat panel display manufacturing apparatus
    5.
    发明申请
    Flat panel display manufacturing apparatus 审中-公开
    平板显示器制造装置

    公开(公告)号：US20050092438A1

    公开(公告)日：2005-05-05

    申请号：US10978797

    申请日：2004-11-01

    申请人： Gwang Hur ,  Jun Choi ,  Cheol Lee ,  Hyun Ahn ,  Saeng Jo ,  Sung Ahn

    发明人： Gwang Hur ,  Jun Choi ,  Cheol Lee ,  Hyun Ahn ,  Saeng Jo ,  Sung Ahn

    IPC分类号： H01L21/687 ,  H01L21/00

    CPC分类号： H01L21/68742 ,  H01L21/68778

    摘要： Disclosed herein is a flat panel display manufacturing apparatus that is capable of performing a predetermined process, such as deposition or etching on a substrate under vacuum. The flat panel display manufacturing apparatus comprises a pin supporting member disposed at the outside of the flat panel display manufacturing apparatus. The pin supporting member is connected to a plurality of lift pins, which lift a substrate from a lower substrate or put the substrate on the lower substrate, for driving the lift pins upward or downward at the same time. Consequently, the inside volume of the flat panel display manufacturing apparatus is decreased as compared to the conventional flat panel display manufacturing apparatus, and thus time for carrying out a pumping operation to apply high-vacuum to the inside of the flat panel display manufacturing apparatus is considerably reduced.

    摘要翻译： 这里公开了一种平板显示器制造装置，其能够进行预定的处理，例如在真空下在基板上的沉积或蚀刻。 平板显示器制造装置包括设置在平板显示器制造装置的外侧的销支撑构件。 销支撑构件连接到多个提升销，其从下基板提起基板或将基板放置在下基板上，以同时向上或向下驱动升降销。 因此，与传统的平板显示器制造设备相比，平板显示器制造设备的内部体积减小，因此用于对平板显示器制造设备的内部进行高真空的泵送操作的时间是 大大减少