发明申请
US20050184248A1 EUV light spectrum measuring apparatus and calculating method of EUV light intensity 失效
EUV光谱测量装置和EUV光强度的计算方法

EUV light spectrum measuring apparatus and calculating method of EUV light intensity
摘要:
A measuring apparatus for measuring a spectrum of extreme ultraviolet light that diverges from a divergent center point of an extreme ultraviolet light source, includes a spectrum measuring unit that includes a spectrometer and a detector that has a spatial resolution in a spectrum forming direction of the spectrometer, and a drive mechanism that makes the spectrum measuring unit movable relative to the divergent center point.
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