发明申请
US20050184248A1 EUV light spectrum measuring apparatus and calculating method of EUV light intensity
失效
EUV光谱测量装置和EUV光强度的计算方法
- 专利标题: EUV light spectrum measuring apparatus and calculating method of EUV light intensity
- 专利标题(中): EUV光谱测量装置和EUV光强度的计算方法
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申请号: US11062026申请日: 2005-02-18
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公开(公告)号: US20050184248A1公开(公告)日: 2005-08-25
- 发明人: Hajime Kanazawa , Akira Miyake , Fumitaro Masaki
- 申请人: Hajime Kanazawa , Akira Miyake , Fumitaro Masaki
- 优先权: JP2004-044724 20040220
- 主分类号: G01J3/36
- IPC分类号: G01J3/36 ; G01J3/00 ; G01J3/18 ; G01N23/207 ; G01T1/29 ; G01T1/36 ; G03F7/20 ; G21K1/06 ; H05G2/00 ; G01J1/42
摘要:
A measuring apparatus for measuring a spectrum of extreme ultraviolet light that diverges from a divergent center point of an extreme ultraviolet light source, includes a spectrum measuring unit that includes a spectrometer and a detector that has a spatial resolution in a spectrum forming direction of the spectrometer, and a drive mechanism that makes the spectrum measuring unit movable relative to the divergent center point.
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