发明申请
US20050184359A1 STRUCTURE AND METHOD OF SELF-ALIGNED BIPOLAR TRANSISTOR HAVING TAPERED COLLECTOR
有权
带有收集器的自对准双极晶体管的结构和方法
- 专利标题: STRUCTURE AND METHOD OF SELF-ALIGNED BIPOLAR TRANSISTOR HAVING TAPERED COLLECTOR
- 专利标题(中): 带有收集器的自对准双极晶体管的结构和方法
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申请号: US10708340申请日: 2004-02-25
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公开(公告)号: US20050184359A1公开(公告)日: 2005-08-25
- 发明人: Hiroyuki Akatsu , Rama Divakaruni , Gregory Freeman , David Greenberg , Marwan Khater , William Tonti
- 申请人: Hiroyuki Akatsu , Rama Divakaruni , Gregory Freeman , David Greenberg , Marwan Khater , William Tonti
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L21/331
- IPC分类号: H01L21/331 ; H01L27/082 ; H01L29/08 ; H01L29/737
摘要:
A bipolar transistor is provided which includes a tapered, i.e. frustum-shaped, collector pedestal having an upper substantially planar surface, a lower surface, and a slanted sidewall extending between the upper surface and the lower surface, the upper surface having substantially less area than the lower surface. The bipolar transistor further includes an intrinsic base overlying the upper surface of the collector pedestal, a raised extrinsic base conductively connected to the intrinsic base and an emitter overlying the intrinsic base. In a particular embodiment, the emitter is self-aligned to the collector pedestal, having a centerline which is aligned to the centerline of the collector pedestal.