发明申请
- 专利标题： Nanolithography methods and products therefor and produced thereby
- 专利标题（中）： 纳米光刻方法和产品，由此生产
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申请号： US11100483申请日： 2005-04-07
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公开(公告)号： US20050191434A1公开(公告)日： 2005-09-01
- 发明人: Chad Mirkin , Seunghun Hong , Vinayak Dravid
- 申请人： Chad Mirkin , Seunghun Hong , Vinayak Dravid
- 专利权人： Northwestern University
- 当前专利权人： Northwestern University
- 主分类号： B05D1/00
- IPC分类号： B05D1/00 ; B05D1/18 ; B05D1/26 ; B82B3/00 ; G01Q60/00 ; G01Q70/16 ; G01Q80/00 ; G03F7/00 ; G03F7/16 ; B05D5/00
摘要：
In one aspect, a method of nanolithography is provided using a driving force to control the movement of a deposition compound from a scanning probe microscope tip to a substrate. Another aspect of the invention provides a tip for use in nanolithography having an internal cavity and an aperture restricting movement of a deposition compound from the tip to the substrate. The rate and extent of movement of the deposition compound through the aperture is controlled by a driving force.
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