发明申请
- 专利标题: Micromirror array device
- 专利标题(中): 微镜阵列器件
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申请号: US11110184申请日: 2005-04-19
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公开(公告)号: US20050196896A1公开(公告)日: 2005-09-08
- 发明人: Satyadev Patel , Andrew Huibers , Chris Spindt , Peter Heureux
- 申请人: Satyadev Patel , Andrew Huibers , Chris Spindt , Peter Heureux
- 主分类号: G09G3/34
- IPC分类号: G09G3/34
摘要:
Disclosed herein is a micromirror array device that comprises an array of reflective deflectable mirror plates each being associated with one single addressing electrode to be deflected to an ON state angle. A light transmissive electrode is disposed proximate to the mirror plates for deflecting the mirror plates to a non-zero OFF angle. The mirror plates are arranged in the array with a center-to-centre distance of 10.17 microns or less.
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