发明申请
- 专利标题: Micromechanical component having a diaphragm, and method for manufacturing such a component
- 专利标题(中): 具有隔膜的微机械部件及其制造方法
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申请号: US11072859申请日: 2005-03-03
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公开(公告)号: US20050204821A1公开(公告)日: 2005-09-22
- 发明人: Frank Fischer , Hans Artmann , Lars Metzger , Arnim Hoechst , Julian Gonska
- 申请人: Frank Fischer , Hans Artmann , Lars Metzger , Arnim Hoechst , Julian Gonska
- 优先权: DE102004010293.7 20040303; DE102005005551.6 20050207
- 主分类号: G01L9/00
- IPC分类号: G01L9/00 ; B81B3/00 ; B81C1/00 ; G01J1/02 ; G01L7/08 ; H01L29/84
摘要:
A micromechanical component having a diaphragm is provided, the structure of which effectively prevents the penetration of dirt particles into the cavity. A method for manufacturing such a component is also provided. The structure of the component is implemented in a layer structure which includes at least one first sacrificial layer and a layer system over the first sacrificial layer. A cavity is formed in the first sacrificial layer underneath the diaphragm. In the region of the diaphragm between the upper layer and the lower layer of the layer system situated directly above the first sacrificial layer, at least one access channel to the cavity is formed which has at least one opening in the upper layer and at least one opening in the lower layer, the opening in the upper layer and the opening in the lower layer being offset with respect to each other.
公开/授权文献
- US07495302B2 Micromechanical component having a diaphragm 公开/授权日:2009-02-24