发明申请
US20050206277A1 Tuning-fork-type vibrating reed, piezoelectric vibrator, angular-rate sensor, and electronic device
审中-公开
调弦叉式振动片,压电振动器,角速率传感器和电子装置
- 专利标题: Tuning-fork-type vibrating reed, piezoelectric vibrator, angular-rate sensor, and electronic device
- 专利标题(中): 调弦叉式振动片,压电振动器,角速率传感器和电子装置
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申请号: US11039810申请日: 2005-01-24
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公开(公告)号: US20050206277A1公开(公告)日: 2005-09-22
- 发明人: Makoto Eguchi , Shigeo Kanna , Masako Tanaka
- 申请人: Makoto Eguchi , Shigeo Kanna , Masako Tanaka
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2004-023935 20040130
- 主分类号: G01C19/56
- IPC分类号: G01C19/56 ; G01C19/5607 ; H01L41/09 ; H01L41/18 ; H03H9/02 ; H03H9/10 ; H03H9/13 ; H03H9/15 ; H03H9/17 ; H03H9/21
摘要:
Exemplary embodiments provide a tuning-fork-type vibrating reed having satisfactory frequency-temperature characteristics in a broad temperature range, i.e. a tuning-fork-type vibrating reed exhibiting small changes in frequency over a broad temperature range is provided. The tuning-fork-type vibrating reed according to exemplary embodiments of the present invention includes a GaPO4 piezoelectric material and a pair of arms having the thickness in Z′-axis direction, the width in X-axis direction, and the length in Y′-axis direction. The X-axis, the Y′-axis, and the Z′-axis are defined by rotating around the X-axis among the crystal X-axis, Y-axis, and Z-axis of the GaPO4 by an angle between 7.7 degrees and 11.3 degrees measured clockwise as viewed from the origin looking in the positive X-axis direction.
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