发明申请
US20050206277A1 Tuning-fork-type vibrating reed, piezoelectric vibrator, angular-rate sensor, and electronic device 审中-公开
调弦叉式振动片,压电振动器,角速率传感器和电子装置

Tuning-fork-type vibrating reed, piezoelectric vibrator, angular-rate sensor, and electronic device
摘要:
Exemplary embodiments provide a tuning-fork-type vibrating reed having satisfactory frequency-temperature characteristics in a broad temperature range, i.e. a tuning-fork-type vibrating reed exhibiting small changes in frequency over a broad temperature range is provided. The tuning-fork-type vibrating reed according to exemplary embodiments of the present invention includes a GaPO4 piezoelectric material and a pair of arms having the thickness in Z′-axis direction, the width in X-axis direction, and the length in Y′-axis direction. The X-axis, the Y′-axis, and the Z′-axis are defined by rotating around the X-axis among the crystal X-axis, Y-axis, and Z-axis of the GaPO4 by an angle between 7.7 degrees and 11.3 degrees measured clockwise as viewed from the origin looking in the positive X-axis direction.
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