发明申请
- 专利标题： Low loss contact structures for silicon based optical modulators and methods of manufacture
- 专利标题（中）： 用于硅基光学调制器的低损耗接触结构和制造方法
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申请号： US10915607申请日： 2004-08-10
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公开(公告)号： US20050207704A1公开(公告)日： 2005-09-22
- 发明人: Thomas Keyser , Cheisan Yue
- 申请人： Thomas Keyser , Cheisan Yue
- 专利权人： Honeywell International Inc.
- 当前专利权人： Honeywell International Inc.
- 主分类号： G02B6/12
- IPC分类号： G02B6/12 ; G02B6/26 ; G02F1/015 ; G02F1/025
摘要：
The present invention provides silicon based thin-film structures that can be used to form high frequency optical modulators. Devices of the invention are formed as layered structures that have a thin-film dielectric layer, such as silicon dioxide, sandwiched between silicon layers. In one aspect of the invention an electrical contact structure is provided. The electrical contact structure comprises a connecting portion that electrically connects an active region of at least one of the silicon layers to a contact portion of the electrical contact structure.