发明申请
- 专利标题: Micro-protruding structure
- 专利标题(中): 微突出结构
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申请号: US11066086申请日: 2005-02-25
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公开(公告)号: US20050212010A1公开(公告)日: 2005-09-29
- 发明人: Masatsugu Shigeno
- 申请人: Masatsugu Shigeno
- 优先权: JP2004-088470 20040325
- 主分类号: B81B1/00
- IPC分类号: B81B1/00 ; B82B1/00 ; G01Q60/38 ; G01Q70/00 ; G01Q70/10 ; G01Q70/12 ; G01Q70/16 ; H01L29/45
摘要:
A micro-protruding structure which has a high positional precision and an angular (directional) precision, which is made of a linear material having a large aspect ratio, and which is provided for an analyzer, a display device, a machining device, a measuring device and an observation device. The micro-protruding structure is fabricated by growing a linear material of a carbon nano-tube from the bottom of the hole structure perforated by a focused ion beam. This permits a direction from the bottom of the hole structure to the opening to become nearly in alignment with the direction of the linear material that protrudes from the hole structure.
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