发明申请
- 专利标题: Method of apparatus for detecting particles on a specimen
- 专利标题(中): 用于检测样品上的颗粒的装置的方法
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申请号: US11086442申请日: 2005-03-23
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公开(公告)号: US20050213086A1公开(公告)日: 2005-09-29
- 发明人: Akira Hamamatsu , Minori Noguchi , Yoshimasa Ohshima , Sachio Uto , Taketo Ueno , Hiroyuki Nakano , Takahiro Jingu , Hisashi Hatano , Yukihisa Mohara , Seiji Otani , Takahiro Togashi
- 申请人: Akira Hamamatsu , Minori Noguchi , Yoshimasa Ohshima , Sachio Uto , Taketo Ueno , Hiroyuki Nakano , Takahiro Jingu , Hisashi Hatano , Yukihisa Mohara , Seiji Otani , Takahiro Togashi
- 优先权: JP2004-094146 20040329
- 主分类号: G01N21/88
- IPC分类号: G01N21/88 ; G01N21/956 ; H01L21/66
摘要:
An apparatus for inspecting a pattern to detect a small pattern defect has an illuminating light source, as illuminating optical system having a plurality of illuminating portions for switching an optical path of illuminating light flux to a surface of board constituting the inspected object from a plurality of directions different from each other, a detecting optical system having a variable magnification using an object lens for condensing reflected diffracted light from the illuminated board, a focusing optical system having a variable magnification capable of focusing an optical image by converged reflected diffracted light with a desired focusing magnification and an optical detector for detecting the optical image focused by the focusing optical system to convert it into an image signal, an A/D converter for converting the image signal into a digital image signal, and an image signal processor for processing the digital image signal to detect the defect.
公开/授权文献
- US07369223B2 Method of apparatus for detecting particles on a specimen 公开/授权日:2008-05-06