Invention Application
- Patent Title: Plasma display panel manufacturing method
- Patent Title (中): 等离子显示屏制造方法
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Application No.: US10511749Application Date: 2004-02-23
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Publication No.: US20050215161A1Publication Date: 2005-09-29
- Inventor: Daisuke Adachi
- Applicant: Daisuke Adachi
- Priority: JP2003-044556 20030221
- International Application: PCT/JP04/02058 WO 20040223
- Main IPC: H01J11/44
- IPC: H01J11/44 ; G03F7/20 ; H01J9/02 ; H01J9/24 ; H01J11/26 ; H01J11/34 ; H01J11/02

Abstract:
The present invention provides a method of manufacturing a PDP that prevents defects due to dust adhering to a photomask, for example, from occurring in a structure of the PDP. In photolithography, exposure is performed twice in a same process, and photomask (22) is moved within an allowable range of displacement in an exposure pattern, between a first and a second exposures. Photomask (22) is exposed twice in total before and after moving photomask (22). Region (21a), an unexposed region due to interruption of dust (22b) attached to photomask (22), can be suppressed, enabling pattern exposure on photosensitive Ag paste film (21) to be favorably performed.
Public/Granted literature
- US07955787B2 Plasma display panel manufacturing method Public/Granted day:2011-06-07
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