公开(公告)号：US20180182652A1

公开(公告)日：2018-06-28

申请号：US15844707

申请日：2017-12-18

Applicant: TOKYO ELECTRON LIMITED

Inventor： Yuji SESHIMO ,  Yoshihiro TAKEZAWA ,  Shigeru NAKAJIMA

IPC: H01L21/67 ,  H01J37/32 ,  H01J11/34

CPC classification number: H01L21/67167 ,  G05B2219/45031 ,  H01J11/34 ,  H01J37/32798 ,  H01L21/67017 ,  H01L21/67109 ,  H01L21/67303 ,  H01L21/67309 ,  H01L21/67757 ,  H01L21/67781

Abstract: A substrate processing apparatus includes a base member having an opening, a substrate holding member fixedly provided on the base member and configured to hold a plurality of substrates in multiple stages in a vertical direction, a plurality of shower plates provided to respectively face the substrates held by the substrate holding member and configured to supply a processing gas to the substrates existing thereunder in a shower shape, at least one gas introduction member configured to introduce the processing gas into the shower plates, a processing container provided to be able to make close contact with the base member and brought into close contact with the base member to define an arrangement space of the substrate holding member as a processing chamber, a heating device configured to heat the substrates in the processing chamber, and an exhaust mechanism configured to evacuate the processing chamber through the opening.

公开(公告)号：US09579624B2

公开(公告)日：2017-02-28

申请号：US14591242

申请日：2015-01-07

Applicant: The Board of Trustees of the University of Illinois

Inventor： J. Gary Eden ,  Sung-Jin Park ,  Jin Hoon Cho ,  Seung Hoon Sung ,  Min Hwan Kim

IPC: B01J19/00 ,  H01J37/32 ,  C25D11/02 ,  H01J11/18 ,  C25D11/12 ,  C25D11/18 ,  C25D11/26 ,  H01J17/16 ,  H01J11/22 ,  H01J11/34 ,  H01J17/06 ,  C01B13/11 ,  H05H1/24

CPC classification number: B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00842 ,  B01J2219/00853 ,  B01J2219/00891 ,  C01B13/115 ,  C25D11/02 ,  C25D11/022 ,  C25D11/026 ,  C25D11/12 ,  C25D11/18 ,  C25D11/26 ,  H01J11/18 ,  H01J11/22 ,  H01J11/34 ,  H01J17/066 ,  H01J17/16 ,  H01J37/32055 ,  H05H2001/2412 ,  H05H2001/2418

Abstract: A gas reactor device includes a plurality of microcavities or microchannels defined at least partially within a thick metal oxide layer consisting essentially of defect free oxide. Electrodes are arranged with respect to the microcavities or microchannels to stimulate plasma generation therein upon application of suitable voltage. One or more or all of the electrodes are encapsulated within the thick metal oxide layer. A gas inlet is configured to receive feedstock gas into the plurality of microcavities or microchannels. An outlet is configured to outlet reactor product from the plurality of microcavities or microchannels. In an example preferred device, the feedstock gas is air or O2 and is converted by the plasma into ozone (O3). In another preferred device, the feedstock gas is an unwanted gas to be decomposed into a desired form. Gas reactor devices of the invention can, for example, decompose gases such as CO2, CH4, or NOx.

Abstract translation: 气体反应器装置包括至少部分地限定在基本上由无缺陷氧化物组成的厚金属氧化物层内的多个微通道或微通道。 电极相对于微腔或微通道布置，以在施加合适的电压时刺激其中的等离子体产生。 一个或多个或所有电极被包封在厚的金属氧化物层内。 气体入口构造成将原料气体接收到多个微腔或微通道中。 出口构造成从多个微腔或微通道出口反应器产物。 在一个示例性的优选装置中，原料气体是空气或O 2，并被等离子体转化为臭氧（O 3）。 在另一个优选的装置中，原料气是一种不想要的气体，被分解成所需的形式。 本发明的气体反应器装置可以例如分解CO 2，CH 4或NO x等气体。

公开(公告)号：US20120128904A1

公开(公告)日：2012-05-24

申请号：US13386981

申请日：2010-08-06

Applicant: Noriaki Masuda ,  Kentaro Ishihara ,  Kazuo Kinoshita ,  Katsuhiro Ito

Inventor： Noriaki Masuda ,  Kentaro Ishihara ,  Kazuo Kinoshita ,  Katsuhiro Ito

IPC: H01J11/34 ,  B32B1/08 ,  H01J29/86 ,  C03C14/00

CPC classification number: H01J5/24 ,  C03C3/066 ,  C03C3/068 ,  C03C3/122 ,  C03C3/14 ,  C03C3/15 ,  C03C8/24 ,  H01J7/22 ,  H01J11/48 ,  H01J11/54 ,  H01J29/86 ,  H01J29/94 ,  H01J2329/867 ,  H01J2329/941

Abstract: A tablet comprises a bismuth-based glass and a refractory filler, wherein: (1) the bismuth-based glass comprises, as a glass composition, in terms of mass %, 70 to 90% of Bi2O3, 2 to 12% of B2O3, 0 to 5% of Al2O3, 1 to 15% of ZnO, 0 to 10% of BaO, and 0 to 8% of CuO+Fe2O3; (2) the tablet comprises 1 to 25 vol % of alumina as the refractory filler; and (3) the filling ratio of the tablet is 71% or more.

Abstract translation: 片剂包括铋基玻璃和耐火填料，其中：（1）铋基玻璃作为玻璃组合物，以质量％计含有70〜90％的Bi 2 O 3，2〜12％的B 2 O 3， 0〜5％的Al2O3，1〜15％的ZnO，0〜10％的BaO和0〜8％的CuO + Fe2O3; （2）片剂含有1〜25体积％的氧化铝作为耐火填料; 和（3）片剂的填充率为71％以上。

公开(公告)号：US20050285523A1

公开(公告)日：2005-12-29

申请号：US10530661

申请日：2004-09-03

Applicant: Morio Fujitani

Inventor： Morio Fujitani

IPC: H01J11/12 ,  H01J11/14 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/34 ,  H01J11/36 ,  H01J11/38 ,  H01J17/49

CPC classification number: H01J11/36 ,  H01J11/12 ,  H01J2211/361

Abstract: A plasma display panel includes a front panel and a rear panel disposed opposing each other. The front panel includes a display electrode composed of a scan electrode and a sustain electrode extending in a row direction. A rear panel includes address electrode extending in a column direction and intersecting the display electrode. A lattice form of barrier ribs of row direction barrier ribs and column direction barrier ribs, which have the same height, forming a plurality of individually divided discharge cells is provided in a part in which the display electrode and the address electrode intersect each other. The row direction barrier ribs of the barrier ribs are provided with communication portions communicating discharge cells in non-parallel to the column direction.

Abstract translation: 等离子体显示面板包括彼此相对设置的前面板和后面板。 前面板包括由扫描电极和沿行方向延伸的维持电极构成的显示电极。 后面板包括沿列方向延伸并与显示电极交叉的寻址电极。 在显示电极和寻址电极彼此相交的部分中设置有形成多个单独分开的放电单元的具有相同高度的行方向阻挡肋和列方向阻挡肋的格栅形状。 隔壁的行方向阻挡肋设置有与排列方向不平行地连通放电单元的连通部。

公开(公告)号：US20050264211A1

公开(公告)日：2005-12-01

申请号：US11133695

申请日：2005-05-19

Applicant: Ki-Dong Kim

Inventor： Ki-Dong Kim

IPC: H01J11/12 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/34 ,  H01J11/40 ,  H01J17/49

CPC classification number: H01J11/40 ,  H01J11/12

Abstract: A plasma display panel comprising first and second substrates positioned substantially parallel to each other, facing each other and separated from each other by a predetermined distance is disclosed. A plurality of address electrodes are formed on the first substrate. A first dielectric layer covers the plurality of address electrodes on the first substrate. A plurality of barrier ribs having predetermined heights are mounted on the first dielectric layer, creating discharge spaces between the first and second substrates. Phosphor layers are formed within the discharge spaces. A plurality of discharge sustain electrodes are formed on the surface of the second substrate facing the first substrate and are positioned perpendicular to the address electrodes on the first substrate. A second dielectric layer is formed on the second substrate covering the discharge sustain electrodes. A protection layer comprising MgO and Ca, Al, Fe and Si dopants covers the second dielectric layer.

Abstract translation: 公开了一种等离子体显示面板，其包括彼此相对定位并彼此相对定位并彼此分开预定距离的第一和第二基板。 在第一基板上形成多个寻址电极。 第一介电层覆盖第一基板上的多个寻址电极。 多个具有预定高度的阻挡肋安装在第一介电层上，从而在第一和第二基板之间产生放电空间。 在放电空间内形成荧光体层。 多个放电维持电极形成在面向第一基板的第二基板的表面上，并且与第一基板上的寻址电极垂直。 在覆盖放电维持电极的第二基板上形成第二电介质层。 包含MgO和Ca，Al，Fe和Si掺杂剂的保护层覆盖第二介电层。

公开(公告)号：US20050264202A1

公开(公告)日：2005-12-01

申请号：US11138320

申请日：2005-05-27

Applicant: Xiaoqing Zeng ,  Hidekazu Hatanaka ,  Young-mo Kim ,  Seung-hyun Son ,  Sang-hun Jang ,  Seong-eui Lee ,  Gi-young Kim ,  Hyoung-bin Park

Inventor： Xiaoqing Zeng ,  Hidekazu Hatanaka ,  Young-mo Kim ,  Seung-hyun Son ,  Sang-hun Jang ,  Seong-eui Lee ,  Gi-young Kim ,  Hyoung-bin Park

IPC: C09K11/62 ,  C09K11/68 ,  H01J11/12 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/34 ,  H01J11/36 ,  H01J11/38 ,  H01J11/40 ,  H01J11/42 ,  H01J61/44 ,  H01J17/49

CPC classification number: H01J11/42 ,  C09K11/623 ,  C09K11/681 ,  H01J11/12

Abstract: A plasma display panel including a transparent front substrate, a rear substrate disposed parallel to the front substrate, a barrier wall disposed between the front substrate and the rear substrate and defining light-emitting cells, address electrodes on the rear substrate and covered by a first dielectric layer, sustain electrode pairs extending in a direction orthogonal to a direction in which the address electrodes extend and covered by a second dielectric layer, red, green and blue phosphor layers coated on sides of the barrier wall and a surface of the first dielectric layer, and red, green and blue phosphor films formed on the second dielectric layer at regions corresponding to regions where the red, green and blue phosphor layers are formed.

Abstract translation: 一种等离子体显示面板，包括透明前基板，与前基板平行设置的后基板，设置在前基板和后基板之间的阻挡壁，并且限定发光单元，后基板上的地址电极被第一 电介质层，维持电极对在与第二电介质层延伸和覆盖寻址电极的方向正交的方向上延伸的红色，绿色和蓝色荧光体层以及第一介电层的表面 以及形成在第二电介质层上的红色，绿色和蓝色荧光体膜的形成有红色，绿色和蓝色荧光体层的区域的区域。

公开(公告)号：US20050264197A1

公开(公告)日：2005-12-01

申请号：US11130172

申请日：2005-05-17

Applicant: Masaki Yoshinari ,  Takashi Yamada ,  Yoichi Okumura ,  Tasuku Ishibashi

Inventor： Masaki Yoshinari ,  Takashi Yamada ,  Yoichi Okumura ,  Tasuku Ishibashi

IPC: H01J11/12 ,  H01J11/14 ,  H01J11/16 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/32 ,  H01J11/34 ,  H01J11/36 ,  H01J11/38 ,  H01J11/40 ,  H01J11/42 ,  H01J17/49

CPC classification number: H01J11/12 ,  H01J11/16 ,  H01J11/36 ,  H01J2211/326 ,  H01J2211/366

Abstract: A front and back glass substrates are placed on either side of a discharge spaces. A plurality of sustain electrode pairs extend in a row direction and are regularly arranged in a column direction on the front glass substrate. A dielectric layer covering the sustain electrode pairs is formed on the front glass substrate. A plurality of address electrodes initiating a discharge in conjunction with the sustain electrodes in each discharge cell formed in the discharge space extend in the column direction and are regularly arranged in the row direction. A first metallic partition wall unit defining the discharge cells is formed on the front glass substrate. A second metallic partition wall unit defining the discharge cells adjoined to the first partition wall unit is formed on the back glass substrate.

Abstract translation: 前后玻璃基板放置在放电空间的两侧。 多个维持电极对沿行方向延伸并且在前玻璃基板上沿列方向规则地排列。 覆盖维持电极对的电介质层形成在前玻璃基板上。 在放电空间中形成的各个放电单元中，与维持电极一起开始放电的多个寻址电极在列方向上延伸并且沿行方向规则地排列。 在前玻璃基板上形成限定放电单元的第一金属隔壁单元。 在后玻璃基板上形成限定与第一分隔壁单元相邻的放电单元的第二金属隔壁单元。

公开(公告)号：US20050264161A1

公开(公告)日：2005-12-01

申请号：US11135292

申请日：2005-05-24

Applicant: Hitoshi Oaku ,  Choichiro Okazaki ,  Masatoshi Shiiki

Inventor： Hitoshi Oaku ,  Choichiro Okazaki ,  Masatoshi Shiiki

IPC: C09K11/59 ,  C09K11/77 ,  H01J11/22 ,  H01J11/24 ,  H01J11/34 ,  H01J11/42 ,  H01J11/50 ,  H01J29/20 ,  H01J61/44 ,  H01J11/02

CPC classification number: C09K11/7734 ,  H01J11/12 ,  H01J11/42 ,  H01J61/44

Abstract: A blue-emitting phosphor is optimized by controlling mole fractions typically of Mg and Si in Sr3-eMgbSi2cO8d:Eue or by further including an optimal amount of at least one additional component such as Ba or Ca. The resulting phosphor exhibits a higher brightness and a higher color purity upon excitation by ultraviolet light emitted as a result of discharge of xenon gas. The optimized phosphor is incorporated into light emitting devices such as lamps and PDPs, and further into display devices.

Abstract translation: 蓝色发光荧光体通过控制Sr 3-x N 2 Si 2 Si 2 O 2中典型的Mg和Si的摩尔分数来优化， 或通过进一步包含最佳量的至少一种另外的组分例如Ba或Ca。 所得到的荧光体在由于氙气的放电而发出的紫外光激发时，具有更高的亮度和较高的色纯度。 将优化的荧光体并入发光器件如灯和PDP中，并且进一步并入显示器件中。

公开(公告)号：US20050258754A1

公开(公告)日：2005-11-24

申请号：US11128361

申请日：2005-05-13

Applicant: Jae-Ik Kwon ,  Kyoung-Doo Kang

Inventor： Jae-Ik Kwon ,  Kyoung-Doo Kang

IPC: H01J11/12 ,  H01J11/14 ,  H01J11/16 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/32 ,  H01J11/34 ,  H01J11/36 ,  H01J11/38 ,  H01J11/40 ,  H01J11/42 ,  H01J17/49

CPC classification number: H01J11/24 ,  H01J11/16 ,  H01J11/38 ,  H01J2211/245

Abstract: A plasma display panel includes a front substrate, a back substrate facing the front substrate, and a plurality of discharge cells between the front substrate and the back substrate. Pairs of discharge electrodes oppose each other in a discharge cell to make a plasma discharge occur in the discharge cell, dielectric layers cover each pair of discharge electrodes, and a thickness of the dielectric layers covering the pairs of discharge electrodes is not uniform.

Abstract translation: 等离子体显示面板包括前基板，与前基板相对的背面基板以及前基板与后基板之间的多个放电单元。 一对放电电极在放电单元中彼此相对以在放电单元中发生等离子体放电，电介质层覆盖每对放电电极，并且覆盖一对放电电极的电介质层的厚度不均匀。

公开(公告)号：US20050258752A1

公开(公告)日：2005-11-24

申请号：US11131689

申请日：2005-05-17

Applicant: Kyoung-Doo Kang

Inventor： Kyoung-Doo Kang

IPC: H01J11/12 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/28 ,  H01J11/34 ,  H01J11/36 ,  H01J17/30 ,  H01J17/49

CPC classification number: H01J11/24 ,  H01J11/12 ,  H01J2211/245 ,  H01J2211/28 ,  H01J2211/323

Abstract: A plasma display panel (PDP) which can realize low voltage driving, to thus reduce power consumption, and which can improve luminous efficiency through a long gap. The PDP includes a first substrate and a second substrate opposing each other, barrier ribs arranged in a space between the first substrate and the second substrate to define a plurality of discharge cells, phosphor layers formed in each of the plurality of discharge cells, address electrodes formed on the second substrate, and display electrodes provided on the first substrate. The display electrodes include igniter electrodes having ends protruding towards insides of the discharge cells, the igniter electrodes opposing the address electrodes within the discharge cells.

Abstract translation: 能够实现低电压驱动的等离子体显示面板（PDP），从而降低功耗，并且能够通过长间隙提高发光效率。 PDP包括彼此相对的第一基板和第二基板，布置在第一基板和第二基板之间的空间中的阻挡肋以限定多个放电单元，形成在多个放电单元中的每个放电单元中的荧光体层，寻址电极 形成在第二基板上，以及设置在第一基板上的显示电极。 显示电极包括具有朝向放电单元内部突出的端部的点火器电极，点火器电极与放电单元内的寻址电极相对。