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发明申请
US20050217372A1 Physical quantity sensor having angular speed sensor and acceleration sensor 审中-公开
具有角速度传感器和加速度传感器的物理量传感器

Physical quantity sensor having angular speed sensor and acceleration sensor
摘要：
A physical quantity sensor includes: a substrate; three angular speed sensors disposed on the substrate; and three acceleration sensors disposed on the substrate. The three angular speed sensors are capable of detecting three components of an angular speed around three axes, each two of which intersect perpendicularly. The three acceleration sensors are capable of detecting three components of an acceleration in another three axes, each two of which intersect perpendicularly. The three axes of the angular speed sensors intersect at one point, and the other three axes of the acceleration sensors intersect at another one point.
摘要（中）：

物理量传感器包括：基板; 设置在基板上的三个角速度传感器; 和设置在基板上的三个加速度传感器。 三个角速度传感器能够检测围绕三个轴的角速度的三个分量，每个轴两个垂直相交。 三个加速度传感器能够检测另外三个轴的三个加速度分量，每个轴两个垂直相交。 角速度传感器的三个轴在一点相交，加速度传感器的另外三个轴在另一个点相交。

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