发明申请
US20050219544A1 Optical image measuring apparatus 失效
光学图像测量装置

Optical image measuring apparatus
摘要:
Provided is an optical image measuring apparatus capable of taking images of an object to be measured in plural depth regions in parallel. An optical image measuring apparatus of the present invention includes: a beam splitter (4) for dividing a light beam into signal light (S) and reference light (R); beam splitters (5-1 to 5-(n−1)) for dividing the reference light (R) into plural reference light beams (R1 to Rn); frequency shifters (6-1 to 6-n) for shifting frequencies of the reference light beams (R-1 to Rn) by different amounts; and reflector plates (7-1 to 7-n) arranged at different distances from an object to be measured (O). The reference light beams (R1 to Rn) and the signal light (S) reflected by the object to be measured in depth regions (D1 to Dn) are superimposed on each other to thereby produce interference light (L). Shutters (9-1 to 9-3) extract interference light components (L1 to Ln) from the reference light (L), and CCD cameras (10-1 to 10-3) receive the interference light component and convert the interference light component into electrical signals to output the signals. A computer (20) forms images in depth regions corresponding to the interference light components based on the electrical signals.
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