发明申请
- 专利标题: Optical image measuring apparatus
- 专利标题(中): 光学图像测量装置
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申请号: US11091478申请日: 2005-03-29
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公开(公告)号: US20050219544A1公开(公告)日: 2005-10-06
- 发明人: Kinpui Chan , Masahiro Akiba , Yasufumi Fukuma , Hiroyuki Otsuka , Hisashi Tsukada
- 申请人: Kinpui Chan , Masahiro Akiba , Yasufumi Fukuma , Hiroyuki Otsuka , Hisashi Tsukada
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOPCON
- 当前专利权人: KABUSHIKI KAISHA TOPCON
- 当前专利权人地址: JP Tokyo
- 优先权: JP2004-100741 20040330
- 主分类号: G01B11/00
- IPC分类号: G01B11/00 ; A61B3/12 ; A61B5/00 ; G01B9/02 ; G01N21/17 ; G01N21/47
摘要:
Provided is an optical image measuring apparatus capable of taking images of an object to be measured in plural depth regions in parallel. An optical image measuring apparatus of the present invention includes: a beam splitter (4) for dividing a light beam into signal light (S) and reference light (R); beam splitters (5-1 to 5-(n−1)) for dividing the reference light (R) into plural reference light beams (R1 to Rn); frequency shifters (6-1 to 6-n) for shifting frequencies of the reference light beams (R-1 to Rn) by different amounts; and reflector plates (7-1 to 7-n) arranged at different distances from an object to be measured (O). The reference light beams (R1 to Rn) and the signal light (S) reflected by the object to be measured in depth regions (D1 to Dn) are superimposed on each other to thereby produce interference light (L). Shutters (9-1 to 9-3) extract interference light components (L1 to Ln) from the reference light (L), and CCD cameras (10-1 to 10-3) receive the interference light component and convert the interference light component into electrical signals to output the signals. A computer (20) forms images in depth regions corresponding to the interference light components based on the electrical signals.
公开/授权文献
- US07548320B2 Optical image measuring apparatus 公开/授权日:2009-06-16