发明申请
- 专利标题： Resist compounds including acid labile groups having hydrophilic groups attached thereto
- 专利标题（中）： 抗性化合物包括具有亲水基团的酸不稳定基团
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申请号： US10815398申请日： 2004-03-31
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公开(公告)号： US20050221217A1公开(公告)日： 2005-10-06
- 发明人: Wang Yueh , Ernisse Putna
- 申请人： Wang Yueh , Ernisse Putna
- 专利权人： Intel Corporation
- 当前专利权人： Intel Corporation
- 主分类号： G03C1/492
- IPC分类号： G03C1/492 ; G03F7/039 ; G03F7/20
摘要：
A compound including a polymeric chain, an acid labile group attached to the polymeric chain, and at least one hydrophilic group attached to the acid labile group is disclosed. Compositions including the compound, and methods of using the compositions are also disclosed.
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