发明申请
- 专利标题: Method of fabricating liquid crystal display device
- 专利标题(中): 制造液晶显示装置的方法
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申请号: US11133315申请日: 2005-05-20
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公开(公告)号: US20050227399A1公开(公告)日: 2005-10-13
- 发明人: Takasuke Hayase , Keiko Yamada , Masami Yamashita , Shinichi Nakata , Akitoshi Maeda
- 申请人: Takasuke Hayase , Keiko Yamada , Masami Yamashita , Shinichi Nakata , Akitoshi Maeda
- 申请人地址: JP KAWASAKI-SHI
- 专利权人: NEC LCD TECHNOLOGIES, LTD.
- 当前专利权人: NEC LCD TECHNOLOGIES, LTD.
- 当前专利权人地址: JP KAWASAKI-SHI
- 优先权: JP2002-311526 20021025; JP2003-362206 20031022
- 主分类号: G02F1/1333
- IPC分类号: G02F1/1333 ; G02F1/1343 ; G02F1/1362 ; G02F1/1368 ; H01L21/77 ; H01L21/84 ; H01L27/146 ; H01L29/15 ; H01L21/00 ; H01L29/04
摘要:
The method of fabricating a liquid crystal display device includes the steps of (a) fabricating a switching device on a substrate, (b) forming an interlayer insulating film on the substrate such that the switching device is covered with the interlayer insulating film, and (c) forming a transparent electrode on the interlayer insulating film, the transparent electrode being electrically connected to the switching device through the interlayer insulating film, the step (c) including (c1) depositing electrically conductive, transparent and amorphous material on the interlayer insulating film, (c2) patterning the material into the transparent electrode, and (c3) turning the transparent electrode into polysilicon by thermal annealing carried out after formation of an alignment film.
公开/授权文献
- US07110058B2 Method of fabricating liquid crystal display device 公开/授权日:2006-09-19
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