Method for manufacturing an LCD device
    1.
    发明授权
    Method for manufacturing an LCD device 有权
    液晶显示装置的制造方法

    公开(公告)号:US07517464B2

    公开(公告)日:2009-04-14

    申请号:US11396721

    申请日:2006-04-04

    IPC分类号: C30B33/00

    摘要: A method for manufacturing a TFT panel of an LCD device includes the steps of wet etching a multilayer metallic structure including a high-melting-point metal film (HMPM) film, Al film and another HMPM film while using side etching technique by using a photoresist mask, hot-water washing the side walls of the Al film after the wet etching, and dry etching for configuring the channel region of a TFT in each pixel, and removing the photoresist mask. The presence of the photoresist mask and the protection film prevents corrosion of Al caused by plasma of the etching gas in the dry etching.

    摘要翻译: 一种用于制造LCD装置的TFT面板的方法包括以下步骤:使用侧蚀刻技术通过使用光致抗蚀剂来湿蚀刻包括高熔点金属膜(HMPM)膜,Al膜和另一HMPM膜的多层金属结构 掩模,在湿法蚀刻之后热水洗涤Al膜的侧壁,以及干法蚀刻以构成每个像素中的TFT的沟道区域,以及去除光致抗蚀剂掩模。 光致抗蚀剂掩模和保护膜的存在防止了由干蚀刻中的蚀刻气体的等离子体引起的Al的腐蚀。

    Electronics device, optical panel, inspection probe, inspection device for the optical panel and inspection method for the optical panel
    3.
    发明申请
    Electronics device, optical panel, inspection probe, inspection device for the optical panel and inspection method for the optical panel 审中-公开
    电子设备,光学面板,检测探针,光学面板检查装置和光学面板的检查方法

    公开(公告)号:US20060170447A1

    公开(公告)日:2006-08-03

    申请号:US11344837

    申请日:2006-02-01

    IPC分类号: G01R31/00

    CPC分类号: G09G3/3611 G09G3/006

    摘要: An electronics device includes: a plurality of signal lines; and a drawing portion to which the plurality of signal lines are drawn to be disposed substantially in parallel with each other, in which the drawing portion has an inspection terminal allocating layer in which predetermined ones out of the signal lines are insulatively covered in a direction intersecting the drawing direction of the signal lines, while other predetermined ones out of the signal lines that are not insulatively covered are exposed as an inspection signal input terminal.

    摘要翻译: 电子设备包括:多个信号线; 以及绘制多个信号线的绘图部分,其基本上彼此平行地布置,其中所述绘制部分具有检查端子分配层,其中信号线中的预定值在与所述信号线交叉的方向上被绝对地覆盖 信号线的绘制方向,而不是绝对覆盖的信号线中的其它预定的一个被暴露为检查信号输入端。

    Liquid crystal display having transparent conductive film on interlayer insulating film formed by coating

    公开(公告)号:US20060146220A1

    公开(公告)日:2006-07-06

    申请号:US11364613

    申请日:2006-02-27

    IPC分类号: G02F1/136

    CPC分类号: G02F1/136227 G02F1/13439

    摘要: A liquid crystal display is fabricated which has bus wires disposed in a grid shape, switching elements coupled to the bus wires, and pixel electrodes which are disposed on an interlayer insulating film formed by coating and which are coupled with the switching elements. In fabricating the liquid crystal display, when a transparent conductive film is formed on the interlayer insulating film which is formed by coating, the temperature of the substrate is controlled to become 100° C.-170° C. In another embodiment, when the transparent conductive film is formed on the interlayer insulating film in a non-heated condition, an oxygen flow rate ratio is set to 1% or lower, and annealing is performed after forming the film. Thereby, when etching the ITO film on the interlayer insulating film, etching residue is not produced. Further, contact resistance between the ITO film and the lower layer metal can be uniformly decreased, and display defects can be obviated.

    Method of forming a lamination film pattern and improved lamination film pattern

    公开(公告)号:US20060081870A1

    公开(公告)日:2006-04-20

    申请号:US11295462

    申请日:2005-12-07

    IPC分类号: H01L33/00 H01L29/22

    摘要: In a method of forming an electrically conductive lamination pattern, an insulating film is formed on a surface of a chromium-containing bottom layer, before an aluminum-containing top layer is formed over the insulating film, so that the insulating film separates the aluminum-containing top layer from the chromium-containing bottom layer. A first selective wet etching process is carried out for selectively etching the aluminum-containing top layer with a first etchant. A second selective wet etching process is carried out for selectively etching the chromium-containing bottom layer with a second etchant in the presence the insulating film which suppresses a hetero-metal-contact-potential-difference between the chromium-containing bottom layer and the aluminum-containing top layer during the second selective wet etching process.

    Display device
    8.
    发明授权
    Display device 有权
    显示设备

    公开(公告)号:US08106875B2

    公开(公告)日:2012-01-31

    申请号:US12555883

    申请日:2009-09-09

    申请人: Akitoshi Maeda

    发明人: Akitoshi Maeda

    IPC分类号: G09G3/36

    摘要: A display device includes: two substrates sandwiching electro-optic material; source and gate lines on one substrate; switching elements coupled to the gate lines; a counter electrode coupled to pixel electrodes; gate dummy pixels including: gate dummy pixel electrodes applying an electric charge to the electro-optic material, and gate dummy switching elements switching between the gate lines and the gate dummy pixel electrodes; source dummy pixels including: source dummy pixel electrodes applying an electric charge to the electro-optic material, and source dummy switching elements switching between the source lines and the source dummy pixel electrodes; a test switch line transmitting a control signal controlling switching of the gate and source dummy switching elements; and test gate and source lines coupled to non-adjacent gate and source dummy pixel electrodes so that the gate and source lines provided with the gate and source dummy pixel electrodes are divided into two or more phases.

    摘要翻译: 显示装置包括:夹持电光材料的两个基板; 源极和栅极线在一个衬底上; 耦合到栅极线的开关元件; 耦合到像素电极的对电极; 栅极虚拟像素包括:向电光材料施加电荷的栅极虚拟像素电极以及在栅极线与栅极虚拟像素电极之间切换的栅极虚拟开关元件; 源虚拟像素包括:向电光材料施加电荷的源虚拟像素电极,以及在源极线和源虚拟像素电极之间切换的源极开关元件; 传输控制信号的测试开关线,所述控制信号控制所述栅极和源虚拟开关元件的切换; 以及耦合到不相邻栅极和源虚拟像素电极的测试栅极和源极线,使得设置有栅极和源极虚像素电极的栅极线和源极线被分成两个或更多个相。