发明申请
US20050227591A1 Processing tool, method of producing processing tool, processing method and processing apparatus
审中-公开
加工工具，加工工具的生产方法，加工方法和加工设备
- 专利标题： Processing tool, method of producing processing tool, processing method and processing apparatus
- 专利标题（中）： 加工工具，加工工具的生产方法，加工方法和加工设备
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申请号： US11149223申请日： 2005-06-10
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公开(公告)号： US20050227591A1公开(公告)日： 2005-10-13
- 发明人: Toshiyuki Enomoto , Yasuhiro Tani , Shigeru Inoue
- 申请人： Toshiyuki Enomoto , Yasuhiro Tani , Shigeru Inoue
- 优先权： JP11-237467 19990824; JP11-260799 19990914; JP11-278608 19990930; JP11-306335 19991028
- 主分类号： B24B1/00
- IPC分类号： B24B1/00 ; B24B7/22 ; B24B9/06 ; B24B21/00 ; B24B21/04 ; B24D3/00 ; B24D3/34 ; H01L21/304
摘要：
A processing tool is used to carry out a fixed-abrasive grinding process on a surface of a silicon work-piece. The processing tool includes abrasive grains made up silica grains. A primary average grain size of the silica grains is desirably 0.8 nm to 10 μm.
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