发明申请
- 专利标题： Apparatus and method for investigating or modifying a surface with a beam of charged particles
- 专利标题（中）： 用带电粒子束调查或修改表面的装置和方法
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申请号： US11106368申请日： 2005-04-14
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公开(公告)号： US20050230621A1公开(公告)日： 2005-10-20
- 发明人: Klaus Edinger , Josef Sellmair , Thorsten Hofmann
- 申请人： Klaus Edinger , Josef Sellmair , Thorsten Hofmann
- 优先权： EP04008972 20040415
- 主分类号： G01N23/00
- IPC分类号： G01N23/00 ; G01N23/227 ; H01J37/02 ; H01J37/28
摘要：
An apparatus for investigating and/or modifying a sample with charged particles, in particular a scanning electron microscope, is provided. The apparatus comprises a beam (1, 2) of charged particles, a shielding element (10) having an opening (30) for the beam of charged particles to pass through, wherein the opening (30) is sufficiently small and the shielding element (10) sufficiently closely positioned to the surface (20) of the sample to reduce the influence of charge accumulation effects at the surface on the beam of charged particles.
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