发明申请
US20050231204A1 Testing MEM device array 失效
测试MEM设备阵列

Testing MEM device array
摘要:
A system of an embodiment of the invention includes an array of micro-electromechanical (MEM) device assemblies and a testing mechanism situated outside of the array of the MEM device assemblies. Each MEM device assembly includes a MEM device capable of being individually written to, but incapable of being electrically read. The testing mechanism tests each MEM device assembly for proper operation without directly reading the MEM device of the MEM device assembly.
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