发明申请
- 专利标题: Testing MEM device array
- 专利标题(中): 测试MEM设备阵列
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申请号: US10825882申请日: 2004-04-17
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公开(公告)号: US20050231204A1公开(公告)日: 2005-10-20
- 发明人: Eric Martin , Adam Ghozeil
- 申请人: Eric Martin , Adam Ghozeil
- 主分类号: B81C99/00
- IPC分类号: B81C99/00 ; G01R31/327 ; G11C29/54 ; G11C29/56
摘要:
A system of an embodiment of the invention includes an array of micro-electromechanical (MEM) device assemblies and a testing mechanism situated outside of the array of the MEM device assemblies. Each MEM device assembly includes a MEM device capable of being individually written to, but incapable of being electrically read. The testing mechanism tests each MEM device assembly for proper operation without directly reading the MEM device of the MEM device assembly.
公开/授权文献
- US07026821B2 Testing MEM device array 公开/授权日:2006-04-11
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