Invention Application
- Patent Title: Device for remote identification of parts
- Patent Title (中): 用于远程识别零件的装置
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Application No.: US10812083Application Date: 2004-03-30
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Publication No.: US20050231372A1Publication Date: 2005-10-20
- Inventor: Richard Parsons
- Applicant: Richard Parsons
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Main IPC: G08B13/14
- IPC: G08B13/14 ; H01L21/00
Abstract:
A method and apparatus for encoding a part in a semiconductor tool with a unique radio frequency response to an external radio frequency excitation. The method and apparatus remotely read the identifying radio frequency characteristic of a component of a semiconductor process tool.
Information query
