发明申请
- 专利标题: Piezoelectric element, method of manufacturing the same, and liquid jet head
- 专利标题(中): 压电元件,其制造方法和液体喷射头
-
申请号: US11040090申请日: 2005-01-24
-
公开(公告)号: US20050236929A1公开(公告)日: 2005-10-27
- 发明人: Li Xin-Shan
- 申请人: Li Xin-Shan
- 专利权人: SEIKO EPSON CORPORATION
- 当前专利权人: SEIKO EPSON CORPORATION
- 优先权: JP2004-016256 20040123; JP2005-004356 20050111
- 主分类号: B41J2/045
- IPC分类号: B41J2/045 ; B41J2/055 ; B41J2/135 ; B41J2/14 ; B41J2/145 ; B41J2/16 ; H01L41/08 ; H01L41/09 ; H01L41/18 ; H01L41/187 ; H01L41/22 ; H01L41/319 ; H01L41/43
摘要:
Provided are a piezoelectric element, a method of manufacturing the same, and a liquid jet head, which can improve, and homogenize, characteristics of a piezoelectric layer. Included are: a step of forming a seed titanium layer interposed therebetween, the seed titanium layer being formed at a desired film thickness by appling by titanium (Ti), at least twice; and a step of forming a piezoelectric precursor film by applying a piezoelectric material on the seed titanium layer, thereafter crystallizing the piezoelectric precursor film by baking, and thereby forming the piezoelectric layer.
公开/授权文献
信息查询
IPC分类: