发明申请
US20050236929A1 Piezoelectric element, method of manufacturing the same, and liquid jet head 失效
压电元件,其制造方法和液体喷射头

Piezoelectric element, method of manufacturing the same, and liquid jet head
摘要:
Provided are a piezoelectric element, a method of manufacturing the same, and a liquid jet head, which can improve, and homogenize, characteristics of a piezoelectric layer. Included are: a step of forming a seed titanium layer interposed therebetween, the seed titanium layer being formed at a desired film thickness by appling by titanium (Ti), at least twice; and a step of forming a piezoelectric precursor film by applying a piezoelectric material on the seed titanium layer, thereafter crystallizing the piezoelectric precursor film by baking, and thereby forming the piezoelectric layer.
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