发明申请
- 专利标题： Refurbishment of a coated chamber component
- 专利标题（中）： 翻新涂层室组件
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申请号： US10833975申请日： 2004-04-27
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公开(公告)号： US20050238807A1公开(公告)日： 2005-10-27
- 发明人: Yixing Lin , Dajiang Xu , Robert Haney , Clifford Stow
- 申请人： Yixing Lin , Dajiang Xu , Robert Haney , Clifford Stow
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 主分类号： H05H1/46
- IPC分类号： H05H1/46 ; B05D3/02 ; B08B3/08 ; B08B3/12 ; B08B7/00 ; B08B7/02 ; C23C14/56 ; H01J9/38 ; H01J37/32 ; H01L21/205 ; H01L21/3065
摘要：
A component of a process chamber is cleaned and refurbished. The component has a structure with an overlying coating having of a first layer. To refurbish the component, the first layer is removed to form an exposed surface on the structure. During or after the removal of the coating, the exposed surface is cleaned with a cleaning fluid, which deposits cleaning residue on the exposed surface. The exposed surface is heated in a substantially non-oxidizing atmosphere to a temperature that is sufficiently high to vaporize the cleaning residue from the surface, thereby forming a cleaned surface. A second layer is formed over the cleaned surface.
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