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15 条记录 (耗时 0.022 秒)

    Refurbishment of a coated chamber component
    1.
    发明申请
    Refurbishment of a coated chamber component 审中-公开
    翻新涂层室组件

    公开(公告)号：US20050238807A1

    公开(公告)日：2005-10-27

    申请号：US10833975

    申请日：2004-04-27

    申请人： Yixing Lin ,  Dajiang Xu ,  Robert Haney ,  Clifford Stow

    发明人： Yixing Lin ,  Dajiang Xu ,  Robert Haney ,  Clifford Stow

    IPC分类号： H05H1/46 ,  B05D3/02 ,  B08B3/08 ,  B08B3/12 ,  B08B7/00 ,  B08B7/02 ,  C23C14/56 ,  H01J9/38 ,  H01J37/32 ,  H01L21/205 ,  H01L21/3065

    CPC分类号： H01J37/32431 ,  B08B3/08 ,  B08B3/12 ,  B08B7/0035 ,  C23C14/564 ,  H01J9/38

    摘要： A component of a process chamber is cleaned and refurbished. The component has a structure with an overlying coating having of a first layer. To refurbish the component, the first layer is removed to form an exposed surface on the structure. During or after the removal of the coating, the exposed surface is cleaned with a cleaning fluid, which deposits cleaning residue on the exposed surface. The exposed surface is heated in a substantially non-oxidizing atmosphere to a temperature that is sufficiently high to vaporize the cleaning residue from the surface, thereby forming a cleaned surface. A second layer is formed over the cleaned surface.

    摘要翻译： 处理室的组件被清洁和翻新。 该组件具有具有第一层的覆盖涂层的结构。 为了翻新部件，去除第一层以在结构上形成暴露的表面。 在去除涂层期间或之后，暴露的表面用清洁液清洁，清洁液将清洁残留物沉积在暴露的表面上。 将暴露的表面在基本上非氧化性气氛中加热到足够高的温度，以使表面上的清洁残余物蒸发，从而形成清洁的表面。 在清洁的表面上形成第二层。

    Cleaning and refurbishing chamber components having metal coatings
    2.
    发明授权
    Cleaning and refurbishing chamber components having metal coatings 有权
    具有金属涂层的清洁和翻新室部件

    公开(公告)号：US07910218B2

    公开(公告)日：2011-03-22

    申请号：US10691418

    申请日：2003-10-22

    申请人： Yixing Lin ,  Dajiang Xu ,  Clifford Stow

    发明人： Yixing Lin ,  Dajiang Xu ,  Clifford Stow

    IPC分类号： B32B9/00

    CPC分类号： C23C14/564 ,  Y10T428/31678

    摘要： A component of a process chamber is refurbished and cleaned to remove an intermetallic compound from the component. The component has a structure having a coating that includes a first metal layer over the intermetallic compound. To refurbish the component, the first metal layer is removed to form an exposed surface that at least partially includes the intermetallic compound. The exposed surface is bead blasted in a penetrative bead blasting step by propelling blasting beads having a bead diameter of less than about 180 micrometers with a gas that is pressurized to a pressure of less than about 310 kPa (45 psi), towards the exposed surface, thereby removing the intermetallic compound from the exposed surface of the structure to form a cleaned surface. A second metal layer is then formed over the cleaned surface.

    摘要翻译： 处理室的组件被翻新和清洁以从组件去除金属间化合物。 该组件具有包括金属间化合物上的第一金属层的涂层的结构。 为了翻新部件，去除第一金属层以形成至少部分地包括金属间化合物的暴露表面。 暴露的表面通过将具有小于约180微米的珠直径的喷射珠推进至小于约310kPa（45psi）的压力的气体朝向暴露表面 从而从结构的暴露表面除去金属间化合物以形成清洁表面。 然后在清洁的表面上形成第二金属层。

    Cleaning and refurbishing chamber components having metal coatings
    6.
    发明申请
    Cleaning and refurbishing chamber components having metal coatings 有权
    具有金属涂层的清洁和翻新室部件

    公开(公告)号：US20050089699A1

    公开(公告)日：2005-04-28

    申请号：US10691418

    申请日：2003-10-22

    申请人： Yixing Lin ,  Dajiang Xu ,  Clifford Stow

    发明人： Yixing Lin ,  Dajiang Xu ,  Clifford Stow

    IPC分类号： H01L21/203 ,  B08B7/00 ,  B32B15/04 ,  C23C4/02 ,  C23C4/12 ,  C23C14/56 ,  C23G1/00 ,  H01L21/304

    CPC分类号： C23C14/564 ,  Y10T428/31678

    摘要： A component of a process chamber is refurbished and cleaned to remove an intermetallic compound from the component. The component has a structure having a coating that includes a first metal layer over the intermetallic compound. To refurbish the component, the first metal layer is removed to form an exposed surface that at least partially includes the intermetallic compound. The exposed surface is bead blasted in a penetrative bead blasting step by propelling blasting beads having a bead diameter of less than about 180 micrometers with a gas that is pressurized to a pressure of less than about 310 kPa (45 psi), towards the exposed surface, thereby removing the intermetallic compound from the exposed surface of the structure to form a cleaned surface. A second metal layer is then formed over the cleaned surface.

    摘要翻译： 处理室的组件被翻新和清洁以从组件去除金属间化合物。 该组件具有包括金属间化合物上的第一金属层的涂层的结构。 为了翻新部件，去除第一金属层以形成至少部分地包括金属间化合物的暴露表面。 暴露的表面通过将具有小于约180微米的珠直径的喷射珠推进至小于约310kPa（45psi）的压力的气体朝向暴露表面 从而从结构的暴露表面除去金属间化合物以形成清洁表面。 然后在清洁的表面上形成第二金属层。