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公开(公告)号：US20210183640A1
公开(公告)日：2021-06-17
申请号：US17270612
申请日：2019-08-21
Applicant: Plasma Investment Sp. z o.o
Inventor： Ihar YELKIN , Edward RESZKE , Grzegorz BINKIEWICZ
Abstract: The subject of the invention is a method and device for reducing contamination in a plasma reactor, especially contamination by lubricants, particularly for plasma processing of materials. The method is based on the fact that the contaminated gas pumped out of at least one reduced pressure vacuum chamber in the form of a plasma lamp (LA1, LA2, LA3) is purified in at least one purifying plasma lamp (LA01, LA02, LAH, LAE), in which a glow discharge is initiated between the anodes of the purifying plasma lamp (A01, A02) and the cathodes of the purifying plasma lamp (K01, K02), favorably particles of lubricants are cracked and partially polymerized, while processed heavy particles of lubricants are collected in a buffer tank (ZB) and then discharged outside the pumping system. The device contains at least one reduced pressure vacuum chamber in the form of a plasma lamp (LA1, LA2, LA3), it is connected to at least one purifying plasma lamp (LA01, LA02, LAH, LAE) with a buffer tank (ZB) connected to a vacuum pump (PP). The vacuum tube connecting the plasma lamps (LA1, LA2, LA3) with the purifying plasma lamp (LA01, LA02, LAH, LAE)) is equipped with a dosing valve (V) for the gaseous admixture medium (MD) to plasma lamps (LA1, LA2, LA3), from which radiation (R1, R2, R3) is directed to the processed material (OM).
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公开(公告)号：US10755903B2
公开(公告)日：2020-08-25
申请号：US15397883
申请日：2017-01-04
Applicant: Applied Materials, Inc.
Inventor： Sidharth Bhatia , Zhili Zuo , Hidehiro Kojiri , Anjana M. Patel , Song-Moon Suh , Ganesh Balasubramanian
Abstract: A method of cleaning a remote plasma source includes supplying a first cycle of one or more first cleaning gases to a remote plasma source. The method includes supplying a second cycle of one or more second cleaning gases to the remote plasma source. The method includes supplying one or more cooling fluids to one or more cooling conduits coupled with the remote plasma source.
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公开(公告)号：US09330876B2
公开(公告)日：2016-05-03
申请号：US14072889
申请日：2013-11-06
Applicant: General Electric Company
Inventor： Ernst Wolfgang Stautner , Joseph Darryl Michael
Abstract: A system for regulating a pressure of a filled-in gas is presented. The system includes a reservoir that stores a reservoir gas adsorbed in a sorbent material at a storage temperature, a gas-filled tube containing the filled-in gas, a controller configured to determine a pressure change required in the filled-in gas based upon signals representative of a pressure of the filled-in gas inside the gas-filled tube and a required pressure threshold, determine an updated temperature of the sorbent material based upon the pressure change required in the filled-in gas, and regulate the pressure of the filled-in gas by controlling the reservoir to change the storage temperature of the sorbent material to reach the updated temperature of the sorbent material.
Abstract translation: 提出了一种用于调节填充气体的压力的系统。 该系统包括储存器，其存储在储存温度下吸附在吸附剂材料中的贮存气体，含有填充气体的充气管，配置成基于信号确定填充气体中所需的压力变化的控制器 代表充气管内的填充气体的压力和所需的压力阈值，基于填充气体中所需的压力变化来确定吸附剂材料的更新温度，并调节填充气体的压力 - 通过控制储存器来改变吸附剂材料的储存温度以达到吸附剂材料的更新温度。
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公开(公告)号：US09123507B2
公开(公告)日：2015-09-01
申请号：US14385802
申请日：2013-03-20
Applicant: MAPPER LITHOGRAPHY IP B.V.
Inventor： Pieter Kruit , Marc Smits
CPC classification number: H01J37/3174 , B82Y10/00 , B82Y40/00 , F15D1/025 , G03F7/70925 , G21K2201/06 , H01J9/38 , H01J37/3007 , H01J37/3177 , H01J37/32862 , H01J2237/006 , H01J2237/022 , H01J2237/327 , Y10T137/2082 , Y10T137/87571
Abstract: The invention relates to an arrangement for transporting radicals. The arrangement includes a plasma generator and a guiding body. The plasma generator includes a chamber (2) in which a plasma may be formed. The chamber has an inlet (5) for receiving an input gas, and one or more outlets (6) for removal of at least one of the plasma and radicals created therein. The guiding body is hollow and is arranged for guiding radicals formed in the plasma towards an area or volume at which contaminant deposition is to be removed. The chamber inlet is coupled to a pressure device (40) for providing a pulsed pressure into the chamber so as to create a flow in the guiding body.
Abstract translation: 本发明涉及一种输送自由基的装置。 该装置包括等离子体发生器和引导体。 等离子体发生器包括可以形成等离子体的腔室（2）。 腔室具有用于接收输入气体的入口（5）和用于去除其中产生的至少一种等离子体和自由基的一个或多个出口（6）。 引导体是中空的，并且被布置成用于将形成在等离子体中的自由基引导到要去除污染物沉积的区域或体积。 腔室入口联接到压力装置（40），用于向腔室提供脉冲压力，以便在引导体中产生流动。
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5.发明授权Method for forming a vent port in a glass panel, and glass panel product manufactured using the same 有权用于在玻璃面板中形成排气口的方法，以及使用其制造的玻璃面板产品公开(公告)号：US08900396B2
公开(公告)日：2014-12-02
申请号：US13392274
申请日：2010-12-22
Applicant: Soon-Ho Kwon , Su-bin Song
Inventor： Soon-Ho Kwon , Su-bin Song
CPC classification number: H01J9/40 , C03C27/06 , H01J9/385 , H01J11/48 , H01J11/54 , H01J2329/941 , Y10T428/24273
Abstract: A method for forming a vent port in a glass panel and a glass panel product manufactured using the same. The vent port has no protruding vent pipe, such that the vent port discharging gas from a sealed space to the outside is formed in either one of a pair of plate glasses separated in a thickness-direction to form the sealed space therebetween, produced by: forming an exhaust hole in either one of the plate glasses; vertically inserting a vent-pipe-type sealing material into the upper portion of the exhaust hole; discharging gas from a space between the plate glasses to the outside; heating the sealant member such that the sealing material is converted into fluid and the exhaust hole is closed by the sealing material having collapsed after being heated; and solidifying the sealing material remaining in the exhaust hole, ensuring good sealing properties without using a protruding vent pipe.
Abstract translation: 一种用于在玻璃面板中形成排气口的方法和使用其制造的玻璃面板产品。 通气口没有突出的排气管，使得从密封空间向外部排出气体的排出口形成在厚度方向上分离的一对平板玻璃中的任一个中，以形成它们之间的密封空间，其通过以下方式制造： 在所述平板玻璃中的任一个中形成排气孔; 将通气管式密封材料垂直插入排气孔的上部; 从玻璃杯之间的空间向外部排出气体; 加热密封剂部件，使得密封材料被转化成流体，并且排气孔被加热之后已经收缩的密封材料封闭; 并固化留在排气孔中的密封材料，确保良好的密封性而不使用突出的排气管。
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Patent Agency Ranking
公开(公告)号：US20130040529A1
公开(公告)日：2013-02-14
申请号：US13541838
申请日：2012-07-05
Applicant: Charles Guthrie , Edwin Charles Odeil , Robin Devonshire , Donald Wilson , Floyd Pothoven
Inventor： Charles Guthrie , Edwin Charles Odeil , Robin Devonshire , Donald Wilson , Floyd Pothoven
IPC: H01J9/38
CPC classification number: H01J65/00 , H01J9/247 , H01J9/395 , H01J9/40 , H01J61/025 , H01J61/33 , H01J65/042 , H01J65/044
Abstract: The manufacture of an electrodeless bulb involves one end of a tube closed off, and a first neck is formed in the tube close to the closed end. A second neck is formed in the tube, close to the still open end; a metal halide pellet of known size is dropped into the tube and the tube is evacuated. With the vacuum being maintained heat is applied to the closed end, causing the metal halide pellet to sublime and with it the impurities. The impurities are drawn off, the vacuum being maintained and the metal halide condenses in the tube between the necks. Once the tube is cool, the evacuation is discontinued and the tube is refilled with noble gas and the quartz tube is sealed off at the second neck.
Abstract translation: 无电极灯泡的制造涉及管的一端封闭，并且在靠近封闭端的管中形成第一颈部。 在管中形成第二个颈部，靠近静止的开口端; 将已知尺寸的金属卤化物颗粒滴入管中并将管抽真空。 在保持真空的情况下，将热量施加到封闭端，导致金属卤化物颗粒升华并带有杂质。 杂质被抽出，保持真空并且金属卤化物在颈部之间在管中冷凝。 一旦管冷却，停止排气，并用惰性气体重新填充管，并在第二颈部密封石英管。
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公开(公告)号：US20120176028A1
公开(公告)日：2012-07-12
申请号：US13004868
申请日：2011-01-11
Applicant: Douglas A. Doughty
Inventor： Douglas A. Doughty
CPC classification number: H01J9/34 , H01J9/385 , H01J9/395 , H01J9/40 , H01J9/42 , H01J61/12 , H01J61/33 , H01J65/042
Abstract: A plasma lamp apparatus. The apparatus has an arc tube structure having an inner region and an outer region in one or more embodiments. The arc tube structure has a first end comprising an associated first end diameter and a second end comprising a second end diameter according to a specific embodiment. The apparatus also has a center region provided between the first end and the second end in one or more embodiments. The center region has a center diameter, which is less than a first end diameter and/or a second end diameter.
Abstract translation: 一种等离子体灯装置。 该装置具有在一个或多个实施例中具有内部区域和外部区域的电弧管结构。 电弧管结构具有包括相关联的第一端直径的第一端和根据具体实施例的包括第二端直径的第二端。 在一个或多个实施例中，设备还具有设置在第一端和第二端之间的中心区域。 中心区域具有小于第一端直径和/或第二端直径的中心直径。
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公开(公告)号：US08087962B2
公开(公告)日：2012-01-03
申请号：US12211230
申请日：2008-09-16
Applicant: Minoru Kumagai
Inventor： Minoru Kumagai
IPC: H01J9/38
CPC classification number: H01L51/0004 , H01L27/3246 , Y10T29/49155
Abstract: A manufacturing method of a display apparatus which comprises a plurality of display pixels including light emitting elements having a carrier transport layer includes first causing a surface of an electrode formed in a forming region of the plurality of display pixels by being enclosed by a partition wall which is provided on a substrate to have a lyophilic characteristic, making a surface of the partition wall have a repellency characteristic and second causing the surface of the electrode to have the lyophilic characteristic again by carrying out a plasma treatment in an inert gas atmosphere.
Abstract translation: 一种显示装置的制造方法，包括包括具有载流子输送层的发光元件的多个显示像素的显示装置，其包括首先通过被分隔壁包围在多个显示像素的形成区域中形成的电极的表面， 设置在基板上以具有亲液性特征，使分隔壁的表面具有驱避特性，第二次通过在惰性气体气氛中进行等离子体处理，使电极的表面再次具有亲液性。
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公开(公告)号：US20110183576A1
公开(公告)日：2011-07-28
申请号：US13046703
申请日：2011-03-12
Applicant: Po-Hung Wang , Jung-Yu Li , Shih-Pu Chen , Yi-Ping Lin , Yen-I Chou , Ming-Chung Liu
Inventor： Po-Hung Wang , Jung-Yu Li , Shih-Pu Chen , Yi-Ping Lin , Yen-I Chou , Ming-Chung Liu
IPC: H01J9/38
Abstract: An electron emission device including a first substrate, a second substrate, a gas, a sealant, and a phosphor layer is provided. The first substrate has a cathode thereon, and the cathode has a patterned profile. The second substrate is opposite to the first substrate and has an anode thereon. The sealant is disposed at edges of the first substrate and the second substrate to assemble the first and second substrates. The gas is disposed between the cathode and the anode and configured to induce a plurality of electrons from the cathode, wherein the pressure of the gas is between 10 torr and 10−3 torr. The phosphor layer is disposed on the moving path of the electrons to react with the electrons so as to emit light.
Abstract translation: 提供了包括第一基板，第二基板，气体，密封剂和荧光体层的电子发射装置。 第一衬底在其上具有阴极，阴极具有图案形状。 第二基板与第一基板相对并且在其上具有阳极。 密封剂设置在第一基板和第二基板的边缘处以组装第一和第二基板。 气体设置在阴极和阳极之间并且被配置为从阴极诱导多个电子，其中气体的压力在10托和10 -3托之间。 荧光体层设置在电子的移动路径上以与电子反应以发光。
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公开(公告)号：US20110163666A1
公开(公告)日：2011-07-07
申请号：US13061675
申请日：2009-08-11
Applicant: Klaus-Dieter Bauer
Inventor： Klaus-Dieter Bauer
CPC classification number: H01J61/305
Abstract: A flat lamp comprising a flat discharge vessel, which encloses a discharge volume with two plates (1, 2) which are separated from one another by way of a frame (3), wherein the frame (3) includes a region which is elastically deformable in the direction of the spacing between the plates.
Abstract translation: 一种扁平灯，包括平坦放电容器，其包围具有通过框架（3）彼此分离的两个板（1,2）的排出容积，其中框架（3）包括可弹性变形的区域 在板之间的间隔方向。
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