发明申请
- 专利标题： Method for manufacturing display device, liquid crystal telvision, and EL television
- 专利标题（中）： 制造显示装置，液晶电视和EL电视的方法
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申请号： US11109642申请日： 2005-04-20
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公开(公告)号： US20050244995A1公开(公告)日： 2005-11-03
- 发明人: Kunihiko Fukuchi , Toshiyuki Isa , Gen Fujii
- 申请人： Kunihiko Fukuchi , Toshiyuki Isa , Gen Fujii
- 申请人地址： JP Atsugi-shi
- 专利权人： Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人： Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址： JP Atsugi-shi
- 优先权： JP2004-134154 20040428
- 主分类号： G02F1/1343
- IPC分类号： G02F1/1343 ; H01L21/768 ; H01L21/77 ; H01L21/84 ; H01L27/32 ; H01L51/56
摘要：
An object of the present invention is to provide a method for manufacturing a display device with few steps and high yield. One feature of the invention is to form a first mask pattern having low wettability over a conductive layer, form a second mask pattern having high wettability over the conductive layer using the first mask pattern as a mask, and form a mask pattern for etching the conductive layer by removing the first mask pattern. Another feature is to form a pixel electrode by etching the conductive layer.
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