发明申请
- 专利标题: Reactive gases with concentrations of increased stability and processes for manufacturing same
- 专利标题(中): 活性气体的浓度增加,稳定性和制造方法相同
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申请号: US11114953申请日: 2005-04-25
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公开(公告)号: US20050257856A1公开(公告)日: 2005-11-24
- 发明人: Tracey Jacksier , Robert Benesch , Malik Haouchine
- 申请人: Tracey Jacksier , Robert Benesch , Malik Haouchine
- 主分类号: C23C16/04
- IPC分类号: C23C16/04 ; C23C16/40 ; C23C22/82 ; F17C3/12
摘要:
Methods of passivating a metal surface are described, the methods comprising the steps of exposing the metal surface to a silicon-containing passivation material, evacuating the metal surface, exposing the treated surface to a gas composition, having a concentration of reactive gas that is greater than an intended reactive gas concentration of gas to be transported by the metal surface, evacuating the metal surface to remove substantially all of the gas composition to enable maintenance of an increased shelf-life, low concentration reactive gas at an intended concentration, and exposing the metal surface to the reactive gas at the intended reactive gas concentration. Manufactured products, high stability fluids, and methods of making same are also described.
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