发明申请
- 专利标题: Electrostatic-type variable diffractive light modulator and manufacturing method thereof
- 专利标题(中): 静电型可变衍射光调制器及其制造方法
-
申请号: US10952245申请日: 2004-09-28
-
公开(公告)号: US20050270622A1公开(公告)日: 2005-12-08
- 发明人: Yoon-Shik Hong , Dong-Ho Shin , Jong-Hyeong Song , Yoon-Joon Choi , Yurlov Victor
- 申请人: Yoon-Shik Hong , Dong-Ho Shin , Jong-Hyeong Song , Yoon-Joon Choi , Yurlov Victor
- 优先权: KR2004-40384 20040603
- 主分类号: G02B26/00
- IPC分类号: G02B26/00 ; G02B26/08 ; G02F1/03 ; G02F1/07
摘要:
Disclosed herein are an electrostatic-type variable diffractive light modulator, which includes lower micromirrors that are provided on a glass substrate to be spaced apart from each other, and actuates upper micromirrors that are spaced apart from the substrate by an electrostatic actuating method, thus allowing the upper and lower micromirrors to diffract incident light entering a lower portion of the substrate, and a method of manufacturing the electrostatic-type variable diffractive light modulator.