Electrostatic-type variable diffractive light modulator and manufacturing method thereof
    1.
    发明授权
    Electrostatic-type variable diffractive light modulator and manufacturing method thereof 失效
    静电型可变衍射光调制器及其制造方法

    公开(公告)号:US07099064B2

    公开(公告)日:2006-08-29

    申请号:US10952245

    申请日:2004-09-28

    IPC分类号: G02B26/00

    CPC分类号: G02B26/0808 Y10S359/904

    摘要: Disclosed herein are an electrostatic-type variable diffractive light modulator, which includes lower micromirrors that are provided on a glass substrate to be spaced apart from each other, and actuates upper micromirrors that are spaced apart from the substrate by an electrostatic actuating method, thus allowing the upper and lower micromirrors to diffract incident light entering a lower portion of the substrate, and a method of manufacturing the electrostatic-type variable diffractive light modulator.

    摘要翻译: 本文公开了一种静电型可变衍射光调制器,其包括设置在玻璃基板上以彼此间隔开的下微镜,并通过静电致动方法致动与基板间隔开的上微反射镜,从而允许 用于衍射进入衬底下部的入射光的上和下微镜,以及制造静电型可变衍射光调制器的方法。

    Variable grating diffractive light modulator
    3.
    发明授权
    Variable grating diffractive light modulator 失效
    可变光栅衍射光调制器

    公开(公告)号:US07133184B2

    公开(公告)日:2006-11-07

    申请号:US10952249

    申请日:2004-09-28

    IPC分类号: G02B26/00

    CPC分类号: G02B26/0808

    摘要: Disclosed herein is a variable grating diffractive light modulator, which actuates lower reflecting plates of a lower reflecting array by a piezoelectric actuating method, and includes an upper reflecting array that is spaced apart from the lower reflecting array and attached to a lower surface of a substrate that is made of a light transmissive material and covers the lower reflecting array, so that the light modulator reflects incident light transmitted through the substrate and thereby produces diffractive light.

    摘要翻译: 本文公开了一种可变光栅衍射光调制器,其通过压电致动方法致动下反射阵列的下​​反射板,并且包括与下反射阵列间隔开并附接到基板的下表面的上反射阵列 其由透光材料制成并且覆盖下反射阵列,使得光调制器反射透射通过基板的入射光,从而产生衍射光。

    Variable grating diffractive light modulator
    4.
    发明申请
    Variable grating diffractive light modulator 失效
    可变光栅衍射光调制器

    公开(公告)号:US20050270625A1

    公开(公告)日:2005-12-08

    申请号:US10952249

    申请日:2004-09-28

    CPC分类号: G02B26/0808

    摘要: Disclosed herein is a variable grating diffractive light modulator, which actuates lower reflecting plates of a lower reflecting array by a piezoelectric actuating method, and includes an upper reflecting array that is spaced apart from the lower reflecting array and attached to a lower surface of a substrate that is made of a light transmissive material and covers the lower reflecting array, so that the light modulator reflects incident light transmitted through the substrate and thereby produces diffractive light.

    摘要翻译: 本文公开了一种可变光栅衍射光调制器,其通过压电致动方法致动下反射阵列的下​​反射板,并且包括与下反射阵列间隔开并附接到基板的下表面的上反射阵列 其由透光材料制成并且覆盖下反射阵列,使得光调制器反射透射通过基板的入射光,从而产生衍射光。

    DEVICE AND METHOD FOR INSPECTING OPTICAL MODULATOR
    5.
    发明申请
    DEVICE AND METHOD FOR INSPECTING OPTICAL MODULATOR 审中-公开
    用于检查光学调制器的装置和方法

    公开(公告)号:US20080095531A1

    公开(公告)日:2008-04-24

    申请号:US11863096

    申请日:2007-09-27

    IPC分类号: H04B10/08

    摘要: An aspect of the present invention provides a device for inspecting an optical modulator. The device can comprise: a probe card that converts an inputted control signal to a driving signal, and provide the driving signal by contacting with each driving signal input pad of an optical modulator—wherein the optical modulator comprises one or more micromirrors and one or more driving signal input pads connected to the micromirrors, respectively, and the micromirror moves up and down according to the driving signal inputted through the driving signal input pad—; and an image control circuit that generates the control signal for checking if the optical modulator is operation properly, and is connected electrically to the probe card to transmit the control signal. A device and a method for inspecting an optical modulator according to the present invention can inspect performance and function of the optical modulator at a chip level.

    摘要翻译: 本发明的一个方面提供了一种用于检查光学调制器的装置。 该装置可以包括:探针卡,其将输入的控制信号转换为驱动信号,并通过与光学调制器的每个驱动信号输入焊盘接触来提供驱动信号,其中光学调制器包括一个或多个微镜和一个或多个 分别连接到微镜的驱动信号输入焊盘,微镜根据通过驱动信号输入焊盘输入的驱动信号上下移动; 以及图像控制电路,其生成用于检查光调制器是否正常工作的控制信号,并且与探针卡电连接以发送控制信号。 根据本发明的用于检查光学调制器的装置和方法可以在芯片级检查光调制器的性能和功能。

    Miniature optical modulator module using flexible printed circuit board
    6.
    发明申请
    Miniature optical modulator module using flexible printed circuit board 失效
    微型光调制器模块采用柔性印刷电路板

    公开(公告)号:US20070053628A1

    公开(公告)日:2007-03-08

    申请号:US11518377

    申请日:2006-09-07

    IPC分类号: G02B6/12

    CPC分类号: G02F1/0121 H05K3/361

    摘要: An optical modulator module is disclosed, comprising a bendable flexible printed circuit board in which a circuit pattern is formed, and to which control signals are inputted from the outside; an optical modulator element modulating an incident light according to a driving voltage and sending out the modulated light; an at least partially transparent substrate through which the incident light and the modulated light pass, and in which a circuit pattern is formed; and a driving integrated circuit electrically connected with the flexible printed circuit board, and supplying the optical modulator element with the driving voltage according to the inputted control signals, the flexible printed circuit board being electrically connected with the substrate.

    摘要翻译: 公开了一种光调制器模块,包括其中形成电路图案的可弯曲柔性印刷电路板,并且从外部向其输入控制信号; 光调制器元件,根据驱动电压调制入射光并发出调制光; 至少部分透明的基板,入射光和调制光通过该基板,其中形成电路图案; 以及与柔性印刷电路板电连接的驱动集成电路,并且根据输入的控制信号向光调制器元件提供驱动电压,柔性印刷电路板与基板电连接。

    Miniature optical modulator module using flexible printed circuit board
    7.
    发明授权
    Miniature optical modulator module using flexible printed circuit board 失效
    微型光调制器模块采用柔性印刷电路板

    公开(公告)号:US07405867B2

    公开(公告)日:2008-07-29

    申请号:US11518377

    申请日:2006-09-07

    IPC分类号: G02F1/00 G02F1/01 G02B26/00

    CPC分类号: G02F1/0121 H05K3/361

    摘要: An optical modulator module is disclosed, comprising a bendable flexible printed circuit board in which a circuit pattern is formed, and to which control signals are inputted from the outside; an optical modulator element modulating an incident light according to a driving voltage and sending out the modulated light; an at least partially transparent substrate through which the incident light and the modulated light pass, and in which a circuit pattern is formed; and a driving integrated circuit electrically connected with the flexible printed circuit board, and supplying the optical modulator element with the driving voltage according to the inputted control signals, the flexible printed circuit board being electrically connected with the substrate.

    摘要翻译: 公开了一种光调制器模块,包括其中形成电路图案的可弯曲柔性印刷电路板,并且从外部向其输入控制信号; 光调制器元件,根据驱动电压调制入射光并发出调制光; 至少部分透明的基板,入射光和调制光通过该基板,其中形成电路图案; 以及与柔性印刷电路板电连接的驱动集成电路,并且根据输入的控制信号向光调制器元件提供驱动电压,柔性印刷电路板与基板电连接。

    Method for driving piezoelectric element or optical modulator including piezoelectric element
    8.
    发明授权
    Method for driving piezoelectric element or optical modulator including piezoelectric element 失效
    用于驱动包括压电元件的压电元件或光学调制器的方法

    公开(公告)号:US07569973B2

    公开(公告)日:2009-08-04

    申请号:US12128567

    申请日:2008-05-28

    IPC分类号: H01L41/09 G02F1/00

    CPC分类号: G02B26/0858 H01L41/042

    摘要: Disclosed are a method for driving a piezoelectric element or an optical modulator including a piezoelectric element and a recorded medium recorded with a program for executing the same. In accordance with an embodiment of the present invention, the method for driving a piezoelectric element causing a displacement object to be displaced by being contracted or expanded according to a supplied driving voltage, including supplying a driving signal to the piezoelectric element during a first driving period in a first voltage range; supplying a control signal for controlling a polarization hysteresis of the piezoelectric element according to a driving, performed during the first driving period, to the piezoelectric element; and supplying the driving signal to the piezoelectric element during a second driving period in a second voltage range.

    摘要翻译: 公开了一种用于驱动压电元件或光调制器的方法,该压电元件或光调制器包括压电元件和记录有用于执行该压电元件的程序的记录介质。 根据本发明的实施例,一种用于驱动通过根据所提供的驱动电压使位移物体收缩或膨胀的压电元件的方法,包括在第一驱动期间向压电元件提供驱动信号 在第一电压范围内; 根据在第一驱动期间执行的驱动,向压电元件提供用于控制压电元件的极化滞后的控制信号; 以及在第二电压范围内的第二驱动期间将所述驱动信号提供给所述压电元件。

    OPTICAL MODULATOR, OPTICAL MODULATOR MODULE AND SCANNING DISPLAY APPARATUS INCLUDING THE SAME
    9.
    发明申请
    OPTICAL MODULATOR, OPTICAL MODULATOR MODULE AND SCANNING DISPLAY APPARATUS INCLUDING THE SAME 审中-公开
    光学调制器,光学调制器模块和扫描显示装置,包括它们

    公开(公告)号:US20090141339A1

    公开(公告)日:2009-06-04

    申请号:US12325988

    申请日:2008-12-01

    IPC分类号: G02F1/29

    CPC分类号: G02B26/06

    摘要: Disclosed are an optical modulator and an optical modulator module that can reduce a laser speckle. The optical modulator module can include an optical modulator, modulating an incident beam of light incident according to a driving signal and outputting the modulated beam of light; and a light transmissive substrate, placed in the optical modulator and formed with a phase control pattern, the incident beam of light and the outputted beam of light passing through the light transmissive substrate and the phase control pattern being formed in a part of a surface that is a light path of the incident beam of light and the outputted beam of light. Here, the phase control pattern, a central peak of an autocorrelation function can have a width that is smaller than a width of the phase control pattern, and a side lobe level is smaller than a level of the central peak.

    摘要翻译: 公开了一种可以减少激光散斑的光调制器和光调制器模块。 光调制器模块可以包括光调制器,根据驱动信号调制入射的入射光束并输出调制的光束; 以及透光基板,放置在光调制器中并形成有相位控制图案,入射光束和输出的光束通过透光基板,相位控制图案形成在表面的一部分中 是入射光束和输出光束的光路。 这里,相位控制图案,自相关函数的中心峰值可以具有小于相位控制图案的宽度的宽度,并且旁瓣电平小于中心峰值的电平。

    METHOD OF PRODUCING DIFFRACTIVE THIN-FILM PIEZOELECTRIC MICROMIRROR
    10.
    发明申请
    METHOD OF PRODUCING DIFFRACTIVE THIN-FILM PIEZOELECTRIC MICROMIRROR 审中-公开
    生产薄膜薄膜压电薄膜的方法

    公开(公告)号:US20080166473A1

    公开(公告)日:2008-07-10

    申请号:US11739058

    申请日:2007-04-23

    IPC分类号: B05D5/12

    CPC分类号: G02B26/0808

    摘要: Disclosed is a method of producing a diffractive micromirror. More particularly, the present invention pertains to a method of producing a diffractive micromirror, in which a recess having a desired depth and width is precisely formed in a piezoelectric operation manner.

    摘要翻译: 公开了衍射微镜的制造方法。 更具体地,本发明涉及一种制造衍射微镜的方法,其中具有期望的深度和宽度的凹槽以压电操作方式精确地形成。