发明申请
US20050275015A1 METHOD AND STRUCTURE FOR PROVIDING TUNED LEAKAGE CURRENT IN CMOS INTEGRATED CIRCUIT
失效
在CMOS集成电路中提供调谐漏电流的方法和结构
- 专利标题: METHOD AND STRUCTURE FOR PROVIDING TUNED LEAKAGE CURRENT IN CMOS INTEGRATED CIRCUIT
- 专利标题(中): 在CMOS集成电路中提供调谐漏电流的方法和结构
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申请号: US10710006申请日: 2004-06-11
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公开(公告)号: US20050275015A1公开(公告)日: 2005-12-15
- 发明人: Brent Anderson , Edward Nowak
- 申请人: Brent Anderson , Edward Nowak
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L21/8238 ; H01L27/12 ; H01L29/49 ; H01L29/76 ; H01L29/78 ; H01L29/786
摘要:
A method and structure for tuning a threshold voltage of nFET and pFET devices in a double-gate CMOS integrated circuit structure, wherein the method comprises performing a PSP (post silicide processing) electrical test on the double-gate CMOS integrated circuit structure, determining nFET and pFET threshold voltages during the PSP test, and implanting the double-gate CMOS integrated circuit structure with an alkali metal ion, wherein the step of implanting adjusts the nFET and pFET threshold voltages by an amount required to match desired off-currents for the nFET and pFET devices. According to the method, prior to the step of performing, the method comprises forming a fin structure over an isolation layer, forming source/drain regions over the fin structure, depositing a gate oxide layer adjacent to the source/drain regions, and forming a gate region over the gate oxide layer and the fin structure. The metal ion comprises any of cesium and rubidium.
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