发明申请
- 专利标题: Visual inspection method and visual inspection apparatus
- 专利标题(中): 目视检查方法和目视检查仪器
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申请号: US11206163申请日: 2005-08-18
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公开(公告)号: US20050276463A1公开(公告)日: 2005-12-15
- 发明人: Yoshihiro Sasaki , Masahiko Nagao
- 申请人: Yoshihiro Sasaki , Masahiko Nagao
- 申请人地址: JP KANAGAWA
- 专利权人: NEC ELECTRONICS CORPORATION,NEC CORPORATION
- 当前专利权人: NEC ELECTRONICS CORPORATION,NEC CORPORATION
- 当前专利权人地址: JP KANAGAWA
- 优先权: JP2001-037497 20010214
- 主分类号: G01B11/24
- IPC分类号: G01B11/24 ; G01N21/956 ; G06T1/00 ; G06T5/00 ; G06T7/00 ; G06T7/60 ; H01L23/12 ; G06K9/00
摘要:
In a visual inspection method and apparatus, a picture processing unit converts an original picture, obtained by taking a photograph of a BGA illuminated by a ring illuminator from above, using a camera, and labels a binary picture obtained by this binary conversion. Then, it forms a rectangle circumscribing an outer circumference of a labeling picture obtained by the labeling, and inverts a labeling picture within the formed circumscribing rectangle, and removes a portion of a region formed by the outer circumference and the circumscribing rectangle in a picture obtained by the inversion, and then generates an inspection picture by adding a picture obtained by the removal to the labeling picture, and accordingly judges a pass or rejection of the inspection target sample based on the generated inspection picture. Thus, the inspection can be carried out at high accuracy irrespectively of a low cost.
公开/授权文献
- US07545970B2 Visual inspection method and visual inspection apparatus 公开/授权日:2009-06-09
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