公开(公告)号：US07664306B2

公开(公告)日：2010-02-16

申请号：US12424105

申请日：2009-04-15

申请人： Yoshihiro Sasaki ,  Masahiko Nagao

发明人： Yoshihiro Sasaki ,  Masahiko Nagao

IPC分类号： G06K9/00 ,  H04N7/18

CPC分类号： G06T7/0004 ,  G01N21/95684 ,  G01N2021/95669 ,  G06T2207/30141

摘要： In a visual inspection method and apparatus, a picture processing unit converts an original picture, obtained by taking a photograph of a BGA illuminated by a ring illuminator from above, by using a camera, and labels a binary picture obtained by this binary conversion. Then, it forms a circumscribing rectangle circumscribing an outer circumference of a labeling picture obtained by the labeling, and inverts a labeling picture within the formed rectangle, and removes a portion of a region formed by the outer circumference and the circumscribing rectangle in a picture obtained by the inversion, and then generates an inspection picture by adding a picture obtained by the removal to the labeling picture, and accordingly judges a pass or rejection of the inspection target sample based on the generated inspection picture. Thus, the inspection can be carried out at a high accuracy irrespectively of a low cost.

公开(公告)号：US06987894B2

公开(公告)日：2006-01-17

申请号：US09841096

申请日：2001-04-25

申请人： Yoshihiro Sasaki ,  Masahiko Nagao

发明人： Yoshihiro Sasaki ,  Masahiko Nagao

IPC分类号： G06K9/54 ,  G06K9/60

CPC分类号： G01R31/319 ,  G01R31/311 ,  H01L22/12

摘要： An appearance inspection apparatus is composed of a memory 14, a thread generator and a plurality of CPUs 10 to 13. The memory 14 stores image data of an appearance of an IC. The thread generator generates a thread in which a procedure is described for independently processing the image data stored in the memory 14 and storing the processing result into the memory 14. The plurality of CPUs 10 to 13 for executing the plurality of threads generated by the thread generator, in parallel. Thus, this can provide an appearance inspection apparatus and an appearance inspection method that can execute an appearance inspection at a high speed, irrespectively of a simple configuration.

摘要翻译： 外观检查装置由存储器14，线程生成器和多个CPU 10〜13构成。 存储器14存储IC的外观的图像数据。 线程生成器生成线程，其中描述了用于独立地处理存储在存储器14中的图像数据并将处理结果存储到存储器14中的过程。 用于执行线程生成器生成的多个线程的多个CPU 10〜13并行。 因此，无论简单的结构如何，都能够提供能够高速进行外观检查的外观检查装置和外观检查方法。

公开(公告)号：US20050276463A1

公开(公告)日：2005-12-15

申请号：US11206163

申请日：2005-08-18

申请人： Yoshihiro Sasaki ,  Masahiko Nagao

发明人： Yoshihiro Sasaki ,  Masahiko Nagao

IPC分类号： G01B11/24 ,  G01N21/956 ,  G06T1/00 ,  G06T5/00 ,  G06T7/00 ,  G06T7/60 ,  H01L23/12 ,  G06K9/00

CPC分类号： G06T7/0004 ,  G01N21/95684 ,  G01N2021/95669 ,  G06T2207/30141

摘要： In a visual inspection method and apparatus, a picture processing unit converts an original picture, obtained by taking a photograph of a BGA illuminated by a ring illuminator from above, using a camera, and labels a binary picture obtained by this binary conversion. Then, it forms a rectangle circumscribing an outer circumference of a labeling picture obtained by the labeling, and inverts a labeling picture within the formed circumscribing rectangle, and removes a portion of a region formed by the outer circumference and the circumscribing rectangle in a picture obtained by the inversion, and then generates an inspection picture by adding a picture obtained by the removal to the labeling picture, and accordingly judges a pass or rejection of the inspection target sample based on the generated inspection picture. Thus, the inspection can be carried out at high accuracy irrespectively of a low cost.

摘要翻译： 在目视检查方法和装置中，图像处理单元使用照相机从通过从上方摄取由环形照明器照亮的BGA的照片而获得的原始图像，并且对通过该二进制转换获得的二进制图像进行标记。 然后，形成围绕通过标签获得的标示图案的外周的矩形，并且反转形成的外接矩形内的标记图像，并且去除由所获得的图像中的外圆周和外接矩形形成的区域的一部分 通过反转，然后通过将通过去除获得的图像添加到标记图片来生成检查图像，并且因此基于生成的检查图像来判断检查对象样本的通过或拒绝。 因此，可以以高精度执行检查，而不管成本低。

公开(公告)号：US20090202141A1

公开(公告)日：2009-08-13

申请号：US12424105

申请日：2009-04-15

申请人： Yoshihiro SASAKI ,  Masahiko Nagao

发明人： Yoshihiro SASAKI ,  Masahiko Nagao

IPC分类号： G06K9/00

CPC分类号： G06T7/0004 ,  G01N21/95684 ,  G01N2021/95669 ,  G06T2207/30141

摘要： In a visual inspection method and apparatus, a picture processing unit converts an original picture, obtained by taking a photograph of a BGA illuminated by a ring illuminator from above, by using a camera, and labels a binary picture obtained by this binary conversion. Then, it forms a circumscribing rectangle circumscribing an outer circumference of a labeling picture obtained by the labeling, and inverts a labeling picture within the formed rectangle, and removes a portion of a region formed by the outer circumference and the circumscribing rectangle in a picture obtained by the inversion, and then generates an inspection picture by adding a picture obtained by the removal to the labeling picture, and accordingly judges a pass or rejection of the inspection target sample based on the generated inspection picture. Thus, the inspection can be carried out at a high accuracy irrespectively of a low cost.

摘要翻译： 在视觉检查方法和装置中，图像处理单元通过使用照相机将从环形照明器照射的BGA的照片获取的原始图像转换成通过使用照相机的标签，并且对通过该二进制转换获得的二值图像进行标记。 然后，形成围绕通过标签获得的标示图案的外周的外接矩形，并且反转所形成的矩形内的标记图像，并且去除由所获得的图像中的外圆周和外接矩形形成的区域的一部分 通过反转，然后通过将通过去除获得的图像添加到标记图片来生成检查图像，并且因此基于生成的检查图像来判断检查对象样本的通过或拒绝。 因此，可以高精度地进行检查，而不管成本低。

公开(公告)号：US06954274B2

公开(公告)日：2005-10-11

申请号：US10107824

申请日：2002-03-28

申请人： Yoshihiro Sasaki ,  Masahiko Nagao

发明人： Yoshihiro Sasaki ,  Masahiko Nagao

IPC分类号： G01B11/02 ,  G01B11/24 ,  G01N21/89 ,  G01N21/956 ,  H01L23/12

CPC分类号： G01N21/95684 ,  G01N2021/8905 ,  G01N2021/95646

摘要： A semiconductor integrated circuit inspecting apparatus inspecting a terminal provided on a mount surface of a semiconductor integrated circuit includes a light emitter, a photographing unit and an inspector. The light emitter emits a linear light obliquely to the mount surface. The photographing unit photographs the mount surface to which the light is emitted to output a photograph signal. The inspector inspects the terminal in accordance with the photograph signal. The photographing unit has N (N is a positive integer) photographing elements. The photograph signal is outputted respectively only from M (M is a positive integer smaller than the N) photographing elements of the N photographing elements.

摘要翻译： 检查设置在半导体集成电路的安装表面上的端子的半导体集成电路检查装置包括发光器，拍摄单元和检查器。 光发射器向安装表面倾斜地发射线性光。 拍摄单元拍摄发射光的安装表面以输出照片信号。 检查员根据照片信号检查终端。 拍摄单元具有N（N是正整数）拍摄元件。 仅从N个拍摄元件的M（M是小于N个）的拍摄元素的正整数分别输出照片信号。

公开(公告)号：US06741734B2

公开(公告)日：2004-05-25

申请号：US09825947

申请日：2001-04-05

申请人： Yoshihiro Sasaki ,  Masahiko Nagao

发明人： Yoshihiro Sasaki ,  Masahiko Nagao

IPC分类号： G06K900

CPC分类号： G06T7/0004 ,  G01N21/956 ,  G06T7/136 ,  G06T2207/30148

摘要： An appearance inspection method, includes (a), (b), (c), (d), (e), (f), (g), and (h). The (a) includes providing an image data in which an inspected sample is photographed. The (b) includes detecting a brightness of each of a plurality of image units included in the image data based on the image data. The (c) includes detecting the number of the image units being identical with each other in the brightness for each of the brightness. The (d) includes detecting, as a measured maximum number, the number that is maximum of the detected numbers as a result of the (c). The (e) includes computing the measured maximum number to determine a set maximum number. The (f) includes determining a threshold level of the brightness based on the set maximum number. The (g) includes converting the image data into a binary pattern based on the threshold level. The (h) includes detecting a defect of the inspected sample based on the binary pattern.

摘要翻译： 外观检查方法包括（a），（b），（c），（d），（e），（f），（g）和（h）。 （a）包括提供其中拍摄被检样品的图像数据。 （b）包括基于图像数据检测包括在图像数据中的多个图像单元中的每一个的亮度。 （c）包括在每个亮度的亮度中检测彼此相同的图像单元的数量。 （d）包括作为测量的最大数目检测作为（c）的结果的检测到的数量的最大值的数量。 （e）包括计算测量的最大数量以确定设定的最大数量。 （f）包括基于设定的最大数量确定亮度的阈值水平。 （g）包括基于阈值水平将图像数据转换成二进制模式。 （h）包括基于二进制图案检测被检查样本的缺陷。

公开(公告)号：US07545970B2

公开(公告)日：2009-06-09

申请号：US11206163

申请日：2005-08-18

申请人： Yoshihiro Sasaki ,  Masahiko Nagao

发明人： Yoshihiro Sasaki ,  Masahiko Nagao

IPC分类号： G06K9/00 ,  H04N7/18

CPC分类号： G06T7/0004 ,  G01N21/95684 ,  G01N2021/95669 ,  G06T2207/30141

摘要： In a visual inspection method and apparatus, a picture processing unit converts an original picture, obtained by taking a photograph of a BGA illuminated by a ring illuminator from above, using a camera, and labels a binary picture obtained by this binary conversion. Then, it forms a rectangle circumscribing an outer circumference of a labeling picture obtained by the labeling, and inverts a labeling picture within the formed circumscribing rectangle, and removes a portion of a region formed by the outer circumference and the circumscribing rectangle in a picture obtained by the inversion, and then generates an inspection picture by adding a picture obtained by the removal to the labeling picture, and accordingly judges a pass or rejection of the inspection target sample based on the generated inspection picture. Thus, the inspection can be carried out at high accuracy irrespectively of a low cost.

摘要翻译： 在目视检查方法和装置中，图像处理单元使用照相机从通过从上方摄取由环形照明器照亮的BGA的照片而获得的原始图像，并且对通过该二进制转换获得的二进制图像进行标记。 然后，形成围绕通过标签获得的标示图案的外周的矩形，并且反转形成的外接矩形内的标记图像，并且去除由所获得的图像中的外圆周和外接矩形形成的区域的一部分 通过反转，然后通过将通过去除获得的图像添加到标记图片来生成检查图像，并且因此基于生成的检查图像来判断检查对象样本的通过或拒绝。 因此，可以以高精度执行检查，而不管成本低。

公开(公告)号：US06950549B2

公开(公告)日：2005-09-27

申请号：US10073168

申请日：2002-02-13

申请人： Yoshihiro Sasaki ,  Masahiko Nagao

发明人： Yoshihiro Sasaki ,  Masahiko Nagao

IPC分类号： G01B11/24 ,  G01N21/956 ,  G06T1/00 ,  G06T5/00 ,  G06T7/00 ,  G06T7/60 ,  H01L23/12 ,  G06K9/00

CPC分类号： G06T7/0004 ,  G01N21/95684 ,  G01N2021/95669 ,  G06T2207/30141

摘要： In a visual inspection method and apparatus, a picture processing unit converts an original picture, obtained by taking a photograph of a BGA illuminated by a ring illuminator from above, using a camera, and labels a binary picture obtained by this binary conversion. Then, it forms a rectangle circumscribing an outer circumference of a labeling picture obtained by the labeling, and inverts a labeling picture within the formed circumscribing rectangle, and removes a portion of a region formed by the outer circumference and the circumscribing rectangle in a picture obtained by the inversion, and then generates an inspection picture by adding a picture obtained by the removal to the labeling picture, and accordingly judges a pass or rejection of the inspection target sample based on the generated inspection picture. Thus, the inspection can be carried out at high accuracy irrespectively of a low cost.

公开(公告)号：US06597805B1

公开(公告)日：2003-07-22

申请号：US09449145

申请日：1999-11-24

申请人： Masahiko Nagao

发明人： Masahiko Nagao

IPC分类号： G06K900

CPC分类号： G06T7/0004 ,  G01R31/311 ,  G06K9/38 ,  G06K2209/01 ,  G06T2207/30148 ,  H01L23/544 ,  H01L2223/54406 ,  H01L2924/0002 ,  H01L2924/00

摘要： A visual inspecting method for an electronic device, comprising steps of: photographing an image of a surface of the electronic device; dividing the photographed image into a plurality of unit regions and obtaining a distribution of gradation levels for each unit region; subtracting a predetermined offset value from the gradation level of the highest frequency selected from the gradation levels for each unit region so as to obtain a binarization level for each unit region; interpolating the binarization levels for unit regions so as to obtain a binarization level at each coordination position of the photographed image; and comparing the gradation level at each coordination position of the photographed image with the binarization level at each coordination position and determining that a defect is present at a coordination position where the gradation level thereat is lower than the binarization level thereat.

摘要翻译： 一种用于电子设备的视觉检查方法，包括以下步骤：拍摄电子设备的表面的图像; 将拍摄图像分割成多个单位区域，并获得每个单位区域的灰度级分布; 从针对每个单位区域的灰度等级中选择的最高频率的灰度级减去预定偏移值，以获得每个单位区域的二值化水平; 内插单元区域的二值化级别，以获得拍摄图像的每个协调位置处的二值化级别; 并且将拍摄图像的每个协调位置处的灰度级别与每个协调位置处的二值化级别进行比较，并且确定在其上的灰度等级低于其二值化级别的协调位置处存在缺陷。