- 专利标题: Laser apparatus, exposure head, exposure apparatus, and optical fiber connection method
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申请号: US11195593申请日: 2005-08-03
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公开(公告)号: US20050281516A1公开(公告)日: 2005-12-22
- 发明人: Yoji Okazaki , Hiromi Ishikawa , Kazuhiko Nagano , Takeshi Fujii , Hiromitsu Yamakawa
- 申请人: Yoji Okazaki , Hiromi Ishikawa , Kazuhiko Nagano , Takeshi Fujii , Hiromitsu Yamakawa
- 专利权人: FUJI PHOTO FILM CO., LTD.
- 当前专利权人: FUJI PHOTO FILM CO., LTD.
- 优先权: JP2002-108543 20020410; JP2002-149888 20020523; JP2002-287632 20020930
- 主分类号: G02B6/04
- IPC分类号: G02B6/04 ; G02B6/08 ; G02B6/255 ; G02B6/26 ; G02B6/42 ; H01S3/067 ; H01S3/30
摘要:
An optical fiber of a bundled fiber light source is an optical fiber whose core diameter is uniform but whose emission end cladding diameter is smaller than an incidence end cladding diameter thereof, and a light emission region thereof is made smaller. An angle of luminous flux from this higher luminance bundled fiber light source, which passes through a lens system and is incident on a DMD, is smaller, i.e., an illumination NA is made smaller. Thus, an angle of flux which is incident on a surface that is to be exposed is smaller. That is, a minute image formation beam can be obtained without increasing the image formation NA, focal depth is lengthen.
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