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公开(公告)号：US07079169B2
公开(公告)日：2006-07-18
申请号：US11116342
申请日：2005-04-28
IPC分类号： B41J2/45
CPC分类号： B41J2/451 , B23K26/0604 , B23K26/066 , B29C64/135 , B29C64/153 , B33Y30/00 , B41J2/45 , B41J2/465 , B41J2/47 , D06L4/50 , D06M10/005 , G02B26/0841 , G03F7/7005 , G03F7/70291 , H04N1/12 , H04N1/191 , H04N1/1916
摘要： In an exposure apparatus of the invention, for a spatial light modulator, each of a plurality of pixel portions fewer than the total number of the pixel portions is controlled with a control signal generated according to exposure information. Namely, a part of the pixel portions is controlled without controlling a whole of the pixel portions on the substrate. Thus, the number of pixels in the pixel portions is decreased, and transfer time of the control signal becomes short. This enables modulation speed of the laser beam to be increased and the high-speed exposure to be performed. An incorporated laser light source, in which the laser beams are incorporated and struck on the optical fiber, is preferable to the laser device. By adopting the incorporated laser light source, high brightness and high output can be obtained, and it is preferable to the exposure of the spatial light modulator. Since the fiber array is obtained with few optical fibers, it is low cost. Since the number of optical fibers is few, the light-emitting region is further decreased when the optical fibers are arrayed.
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公开(公告)号：US07095921B2
公开(公告)日：2006-08-22
申请号：US11195594
申请日：2005-08-03
IPC分类号： G02B6/26
CPC分类号： G02B6/4249 , G02B6/04 , G02B6/08 , G02B6/2551 , G02B6/4206 , G02B6/425 , H01S3/06708 , H01S3/06745
摘要： An optical fiber of a bundled fiber light source is an optical fiber whose core diameter is uniform but whose emission end cladding diameter is smaller than an incidence end cladding diameter thereof, and a light emission region thereof is made smaller. An angle of luminous flux from this higher luminance bundled fiber light source, which passes through a lens system and is incident on a DMD, is smaller, i.e., an illumination NA is made smaller. Thus, an angle of flux which is incident on a surface that is to be exposed is smaller. That is, a minute image formation beam can be obtained without increasing the image formation NA, focal depth is lengthen.
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公开(公告)号：US07015488B2
公开(公告)日：2006-03-21
申请号：US11104561
申请日：2005-04-13
CPC分类号： B41J2/451 , B23K26/0604 , B23K26/066 , B29C64/135 , B29C64/153 , B33Y30/00 , B41J2/45 , B41J2/465 , B41J2/47 , D06L4/50 , D06M10/005 , G02B26/0841 , G03F7/7005 , G03F7/70291 , H04N1/12 , H04N1/191 , H04N1/1916
摘要： In an exposure apparatus of the invention, for a spatial light modulator, each of a plurality of pixel portions fewer than the total number of the pixel portions is controlled with a control signal generated according to exposure information. Namely, a part of the pixel portions is controlled without controlling a whole of the pixel portions on the substrate. Thus, the number of pixels in the pixel portions is decreased, and transfer time of the control signal becomes short. This enables modulation speed of the laser beam to be increased and the high-speed exposure to be performed. An incorporated laser light source, in which the laser beams are incorporated and struck on the optical fiber, is preferable to the laser device. By adopting the incorporated laser light source, high brightness and high output can be obtained, and it is preferable to the exposure of the spatial light modulator. Since the fiber array is obtained with few optical fibers, it is low cost. Since the number of optical fibers is few, the light-emitting region is further decreased when the optical fibers are arrayed.
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公开(公告)号：US20050191016A1
公开(公告)日：2005-09-01
申请号：US11116342
申请日：2005-04-28
IPC分类号： B23K26/06 , B29C67/00 , B41J2/447 , B41J2/465 , B41J2/47 , D06L3/04 , D06M10/00 , G02B26/08 , G03F7/20 , H04N1/12 , H04N1/191 , G02B6/04
CPC分类号： B41J2/451 , B23K26/0604 , B23K26/066 , B29C64/135 , B29C64/153 , B33Y30/00 , B41J2/45 , B41J2/465 , B41J2/47 , D06L4/50 , D06M10/005 , G02B26/0841 , G03F7/7005 , G03F7/70291 , H04N1/12 , H04N1/191 , H04N1/1916
摘要： In an exposure apparatus of the invention, for a spatial light modulator, each of a plurality of pixel portions fewer than the total number of the pixel portions is controlled with a control signal generated according to exposure information. Namely, a part of the pixel portions is controlled without controlling a whole of the pixel portions on the substrate. Thus, the number of pixels in the pixel portions is decreased, and transfer time of the control signal becomes short. This enables modulation speed of the laser beam to be increased and the high-speed exposure to be performed. An incorporated laser light source, in which the laser beams are incorporated and struck on the optical fiber, is preferable to the laser device. By adopting the incorporated laser light source, high brightness and high output can be obtained, and it is preferable to the exposure of the spatial light modulator. Since the fiber array is obtained with few optical fibers, it is low cost. Since the number of optical fibers is few, the light-emitting region is further decreased when the optical fibers are arrayed.
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公开(公告)号：US20050180692A1
公开(公告)日：2005-08-18
申请号：US11104561
申请日：2005-04-13
IPC分类号： B23K26/06 , B29C67/00 , B41J2/447 , B41J2/465 , B41J2/47 , D06L3/04 , D06M10/00 , G02B26/08 , G03F7/20 , H04N1/12 , H04N1/191 , G02B6/34
CPC分类号： B41J2/451 , B23K26/0604 , B23K26/066 , B29C64/135 , B29C64/153 , B33Y30/00 , B41J2/45 , B41J2/465 , B41J2/47 , D06L4/50 , D06M10/005 , G02B26/0841 , G03F7/7005 , G03F7/70291 , H04N1/12 , H04N1/191 , H04N1/1916
摘要： In an exposure apparatus of the invention, for a spatial light modulator, each of a plurality of pixel portions fewer than the total number of the pixel portions is controlled with a control signal generated according to exposure information. Namely, a part of the pixel portions is controlled without controlling a whole of the pixel portions on the substrate. Thus, the number of pixels in the pixel portions is decreased, and transfer time of the control signal becomes short. This enables modulation speed of the laser beam to be increased and the high-speed exposure to be performed. An incorporated laser light source, in which the laser beams are incorporated and struck on the optical fiber, is preferable to the laser device. By adopting the incorporated laser light source, high brightness and high output can be obtained, and it is preferable to the exposure of the spatial light modulator. Since the fiber array is obtained with few optical fibers, it is low cost. Since the number of optical fibers is few, the light-emitting region is further decreased when the optical fibers are arrayed.
摘要翻译： 在本发明的曝光装置中，对于空间光调制器，利用根据曝光信息生成的控制信号来控制少于像素部分总数的多个像素部分中的每一个。 即，在不控制基板上的整个像素部分的情况下，控制像素部分的一部分。 因此，像素部分中的像素数量减少，并且控制信号的传送时间变短。 这使得能够增加激光束的调制速度并执行高速曝光。 其中激光束并入并撞击在光纤上的并入的激光光源优于激光装置。 通过采用所结合的激光光源，可以获得高亮度和高输出，并且优选空间光调制器的曝光。 由于光纤阵列获得的光纤很少，所以成本低。 由于光纤的数量少，所以在配置光纤时，发光区域进一步降低。
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公开(公告)号：US07048528B2
公开(公告)日：2006-05-23
申请号：US11104427
申请日：2005-04-13
CPC分类号： B41J2/451 , B23K26/0604 , B23K26/066 , B29C64/135 , B29C64/153 , B33Y30/00 , B41J2/45 , B41J2/465 , B41J2/47 , D06L4/50 , D06M10/005 , G02B26/0841 , G03F7/7005 , G03F7/70291 , H04N1/12 , H04N1/191 , H04N1/1916
摘要： In an exposure apparatus of the invention, for a spatial light modulator, each of a plurality of pixel portions fewer than the total number of the pixel portions is controlled with a control signal generated according to exposure information. Namely, a part of the pixel portions is controlled without controlling a whole of the pixel portions on the substrate. Thus, the number of pixels in the pixel portions is decreased, and transfer time of the control signal becomes short. This enables modulation speed of the laser beam to be increased and the high-speed exposure to be performed. An incorporated laser light source, in which the laser beams are incorporated and struck on the optical fiber, is preferable to the laser device. By adopting the incorporated laser light source, high brightness and high output can be obtained, and it is preferable to the exposure of the spatial light modulator. Since the fiber array is obtained with few optical fibers, it is low cost. Since the number of optical fibers is few, the light-emitting region is further decreased when the optical fibers are arrayed.
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7.发明申请Laser apparatus, exposure head, exposure apparatus, and optical fiber connection method 有权激光装置，曝光头，曝光装置和光纤连接方法公开(公告)号：US20050265655A1
公开(公告)日：2005-12-01
申请号：US11195594
申请日：2005-08-03
CPC分类号： G02B6/4249 , G02B6/04 , G02B6/08 , G02B6/2551 , G02B6/4206 , G02B6/425 , H01S3/06708 , H01S3/06745
摘要： An optical fiber of a bundled fiber light source is an optical fiber whose core diameter is uniform but whose emission end cladding diameter is smaller than an incidence end cladding diameter thereof, and a light emission region thereof is made smaller. An angle of luminous flux from this higher luminance bundled fiber light source, which passes through a lens system and is incident on a DMD, is smaller, i.e., an illumination NA is made smaller. Thus, an angle of flux which is incident on a surface that is to be exposed is smaller. That is, a minute image formation beam can be obtained without increasing the image formation NA, focal depth is lengthen.
摘要翻译： 束状纤维光源的光纤是芯直径均匀但发射端包层直径比其入射端包层直径小的光纤，其发光区域变小。 来自通过透镜系统并入射到DMD上的该较高亮度束状光纤光源的光通量的角度较小，即使照明NA更小。 因此，入射在要曝光的表面上的通量角较小。 也就是说，可以在不增加图像形成NA的情况下获得微小的图像形成光束，焦点深度被延长。
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公开(公告)号：US20050179772A1
公开(公告)日：2005-08-18
申请号：US11104427
申请日：2005-04-13
IPC分类号： B23K26/06 , B29C67/00 , B41J2/447 , B41J2/465 , B41J2/47 , D06L3/04 , D06M10/00 , G02B26/08 , G03F7/20 , H04N1/12 , H04N1/191
CPC分类号： B41J2/451 , B23K26/0604 , B23K26/066 , B29C64/135 , B29C64/153 , B33Y30/00 , B41J2/45 , B41J2/465 , B41J2/47 , D06L4/50 , D06M10/005 , G02B26/0841 , G03F7/7005 , G03F7/70291 , H04N1/12 , H04N1/191 , H04N1/1916
摘要： In an exposure apparatus of the invention, for a spatial light modulator, each of a plurality of pixel portions fewer than the total number of the pixel portions is controlled with a control signal generated according to exposure information. Namely, a part of the pixel portions is controlled without controlling a whole of the pixel portions on the substrate. Thus, the number of pixels in the pixel portions is decreased, and transfer time of the control signal becomes short. This enables modulation speed of the laser beam to be increased and the high-speed exposure to be performed. An incorporated laser light source, in which the laser beams are incorporated and struck on the optical fiber, is preferable to the laser device. By adopting the incorporated laser light source, high brightness and high output can be obtained, and it is preferable to the exposure of the spatial light modulator. Since the fiber array is obtained with few optical fibers, it is low cost. Since the number of optical fibers is few, the light-emitting region is further decreased when the optical fibers are arrayed.
摘要翻译： 在本发明的曝光装置中，对于空间光调制器，利用根据曝光信息生成的控制信号来控制少于像素部分总数的多个像素部分中的每一个。 即，在不控制基板上的整个像素部分的情况下，控制像素部分的一部分。 因此，像素部分中的像素数量减少，并且控制信号的传送时间变短。 这使得能够增加激光束的调制速度并执行高速曝光。 其中激光束并入并撞击在光纤上的并入的激光光源优于激光装置。 通过采用所结合的激光光源，可以获得高亮度和高输出，并且优选空间光调制器的曝光。 由于光纤阵列获得的光纤很少，所以成本低。 由于光纤的数量少，所以在配置光纤时，发光区域进一步降低。
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公开(公告)号：US07112760B2
公开(公告)日：2006-09-26
申请号：US10456741
申请日：2003-06-09
申请人： Hiromi Ishikawa , Akinori Harada , Kazuhiko Nagano , Yoji Okazaki , Takeshi Fujii , Hideo Yamanaka , Hiromitsu Yamakawa
发明人： Hiromi Ishikawa , Akinori Harada , Kazuhiko Nagano , Yoji Okazaki , Takeshi Fujii , Hideo Yamanaka , Hiromitsu Yamakawa
IPC分类号： B23K26/00
CPC分类号： B23K26/0608 , B23K26/0604 , C23C14/28 , C23C16/483
摘要： A laser annealer has a laser light source with at least one GaN-type semiconductor laser and is configured so as to form emission points that emit laser beams having a wavelength of 350 to 450 nm, and a scanning device for scanning an annealing surface with the laser beams. The laser annealer may have a spatial light modulator for modulating the laser beams, and in which pixel portions whose light modulating states change in accordance with control signals are arranged on a substrate. The invention is applied to a laser thin-film forming apparatus. The apparatus has a laser source that has at least one semiconductor laser and is configured so as to form emission points, and an optical system for focusing laser beams into a single beam in the width direction of a substrate.
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公开(公告)号：US07077972B2
公开(公告)日：2006-07-18
申请号：US11104598
申请日：2005-04-13
CPC分类号： B41J2/451 , B23K26/0604 , B23K26/066 , B29C64/135 , B29C64/153 , B33Y30/00 , B41J2/45 , B41J2/465 , B41J2/47 , D06L4/50 , D06M10/005 , G02B26/0841 , G03F7/7005 , G03F7/70291 , H04N1/12 , H04N1/191 , H04N1/1916
摘要： A method of creating a micro-channel in a substrate surface by exposing a resist film with a laser beam, removing the exposed resist film per the predetermined pattern, and etching the substrate using the predetermined pattern to form the micro-channel.
摘要翻译： 一种通过用激光束曝光抗蚀剂膜而在衬底表面上产生微通道的方法，每隔预定图案移除曝光的抗蚀剂膜，并使用预定图案蚀刻衬底以形成微通道。
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