发明申请
- 专利标题: Single piece coil support assemblies, coil constructions and methods of assembling coil constructions
- 专利标题(中): 单线圈支撑组件,线圈结构和组装线圈结构的方法
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申请号: US10880172申请日: 2004-06-28
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公开(公告)号: US20050284756A1公开(公告)日: 2005-12-29
- 发明人: Len Hom , John Mize , Robert Prater , David Chan , Gilbert Amador , Peter Kang
- 申请人: Len Hom , John Mize , Robert Prater , David Chan , Gilbert Amador , Peter Kang
- 主分类号: C23C14/04
- IPC分类号: C23C14/04 ; C23C14/34 ; H01J37/34 ; C23C14/00
摘要:
The invention includes a coil support assembly having an insulator interfacing a surface of a shield disposed within a processing chamber. The insulator has an extension which extends through the shield. A second insulator is disposed between the shield and a coil and contacts a protrusion extending from the coil. A fastener is disposed through the first insulator and extends through the second insulator and into the protrusion. The fastener is electrically isolated from the shield by the first insulator. The invention includes coil assemblies containing the described coil support configuration. The invention further includes a method of supporting a coil within a processing chamber having a shield disposed therein. Insulators are inserted to extend from an outer side of the shield through a thickness of the shield. A coil is mounted within the chamber by inserting fasteners through each insulator into bosses which-protrude outwardly from the coil body.
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