发明申请
- 专利标题: Flange-mounted transducer
- 专利标题(中): 法兰安装传感器
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申请号: US10875659申请日: 2004-06-23
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公开(公告)号: US20050284912A1公开(公告)日: 2005-12-29
- 发明人: Bao Zhai , Ka Shing Kwan
- 申请人: Bao Zhai , Ka Shing Kwan
- 专利权人: ASM Technology Singapore Pte Ltd.
- 当前专利权人: ASM Technology Singapore Pte Ltd.
- 主分类号: B06B3/00
- IPC分类号: B06B3/00 ; B23K1/06 ; B23K20/10 ; H01L21/60
摘要:
A flange-mounted transducer, such as an ultrasonic transducer, is provided that comprises a horn and a driver coupled to the horn for generating an oscillatory energy supply to the horn. A support structure interface is positioned at a node of longitudinal oscillatory displacement of the transducer and a support structure spaced from the horn extends from the support structure interface in a direction substantially parallel to a longitudinal axis of the horn. A flange mounted to the support structure at a node of radial oscillatory displacement of the support structure allows the transducer to be mounted to a machine, such as an ultrasonic wire-bonding machine, at a mounting position so that minimal vibration is transmitted from the transducer to the mounting position.
公开/授权文献
- US07303110B2 Flange-mounted transducer 公开/授权日:2007-12-04
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