发明申请
- 专利标题： Performance analyses of micromirror devices
- 专利标题（中）： 微镜器件的性能分析
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申请号： US10875760申请日： 2004-06-23
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公开(公告)号： US20050286045A1公开(公告)日： 2005-12-29
- 发明人: Igor Volfman , Andrew Huibers , Satyadev Patel , Peter Richards , Leonid Frenkel , Jim Dunphy , Regis Grasser , Greg Schaadt
- 申请人： Igor Volfman , Andrew Huibers , Satyadev Patel , Peter Richards , Leonid Frenkel , Jim Dunphy , Regis Grasser , Greg Schaadt
- 主分类号： G01N21/55
- IPC分类号： G01N21/55 ; G01N21/88 ; G01N21/95
摘要：
The invention provides a method and apparatus for evaluating the product quality and performances of micromirror array devices through measurements of the electromechanical responses of the individual micromirrors to the driving forces of electric fields. The electromechanical responses of the micromirrors according to the present invention are described in terms of the rotational angles associated with the operational states, such as the ON and OFF state angles of the ON and OFF state when the micromirror array device is operated in the binary-state mode, and the response speed (i.e. the time interval required for a micromirror device to transit form one state to another) of the individual micromirrors to the driving fields.
公开/授权文献
- US07483126B2 Performance analyses of micromirror devices 公开/授权日：2009-01-27