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公开(公告)号：US07483126B2
公开(公告)日：2009-01-27
申请号：US10875760
申请日：2004-06-23
申请人： Igor Volfman , Andrew Huibers , Satyadev Patel , Peter Richards , Leonid Frenkel , Jim Dunphy , Regis Grasser , Greg Schaadt
发明人： Igor Volfman , Andrew Huibers , Satyadev Patel , Peter Richards , Leonid Frenkel , Jim Dunphy , Regis Grasser , Greg Schaadt
摘要： The invention provides a method and apparatus for evaluating the product quality and performances of micromirror array devices through measurements of the electromechanical responses of the individual micromirrors to the driving forces of electric fields. The electromechanical responses of the micromirrors according to the present invention are described in terms of the rotational angles associated with the operational states, such as the ON and OFF state angles of the ON and OFF state when the micromirror array device is operated in the binary-state mode, and the response speed (i.e. the time interval required for a micromirror device to transit form one state to another) of the individual micromirrors to the driving fields.
摘要翻译： 本发明提供一种用于通过测量各个微镜对电场驱动力的机电响应来评估微镜阵列器件的产品质量和性能的方法和装置。 根据本发明的微反射镜的机电响应以与操作状态相关联的旋转角度进行描述，例如当微镜阵列器件在二进制编码器中操作时，ON和OFF状态的ON和OFF状态角， 状态模式以及各个微镜对驱动场的响应速度（即，微镜器件从一个状态转移到另一个状态所需的时间间隔）。
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公开(公告)号：US20050286045A1
公开(公告)日：2005-12-29
申请号：US10875760
申请日：2004-06-23
申请人： Igor Volfman , Andrew Huibers , Satyadev Patel , Peter Richards , Leonid Frenkel , Jim Dunphy , Regis Grasser , Greg Schaadt
发明人： Igor Volfman , Andrew Huibers , Satyadev Patel , Peter Richards , Leonid Frenkel , Jim Dunphy , Regis Grasser , Greg Schaadt
摘要： The invention provides a method and apparatus for evaluating the product quality and performances of micromirror array devices through measurements of the electromechanical responses of the individual micromirrors to the driving forces of electric fields. The electromechanical responses of the micromirrors according to the present invention are described in terms of the rotational angles associated with the operational states, such as the ON and OFF state angles of the ON and OFF state when the micromirror array device is operated in the binary-state mode, and the response speed (i.e. the time interval required for a micromirror device to transit form one state to another) of the individual micromirrors to the driving fields.
摘要翻译： 本发明提供一种用于通过测量各个微镜对电场驱动力的机电响应来评估微镜阵列器件的产品质量和性能的方法和装置。 根据本发明的微反射镜的机电响应以与操作状态相关联的旋转角度进行描述，例如当微镜阵列器件在二进制编码器中操作时，ON和OFF状态的ON和OFF状态角， 状态模式以及各个微镜对驱动场的响应速度（即，微镜器件从一个状态转移到另一个状态所需的时间间隔）。
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公开(公告)号：US20090190825A1
公开(公告)日：2009-07-30
申请号：US12360083
申请日：2009-01-26
申请人： Igor Volfman , Andrew Huibers , Satyadev Patel , Peter Richards , Leonid Frenkel , Jim Dunphy , Regis Grasser , Greg Schaadt
发明人： Igor Volfman , Andrew Huibers , Satyadev Patel , Peter Richards , Leonid Frenkel , Jim Dunphy , Regis Grasser , Greg Schaadt
摘要： The invention provides a method and apparatus for evaluating the product quality and performances of micromirror array devices through measurements of the electromechanical responses of the individual micromirrors to the driving forces of electric fields. The electromechanical responses of the micromirrors according to the present invention are described in terms of the rotational angles associated with the operational states, such as the ON and OFF state angles of the ON and OFF state when the micromirror array device is operated in the binary-state mode, and the response speed (i.e. the time interval required for a micromirror device to transit form one state to another) of the individual micromirrors to the driving fields.
摘要翻译： 本发明提供一种用于通过测量各个微镜对电场驱动力的机电响应来评估微镜阵列器件的产品质量和性能的方法和装置。 根据本发明的微反射镜的机电响应以与操作状态相关联的旋转角度进行描述，例如当微镜阵列器件在二进制编码器中操作时，ON和OFF状态的ON和OFF状态角， 状态模式以及各个微镜对驱动场的响应速度（即，微镜器件从一个状态转移到另一个状态所需的时间间隔）。
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公开(公告)号：US07557932B2
公开(公告)日：2009-07-07
申请号：US11110338
申请日：2005-04-19
申请人： Jonathan Doan , Regis Grasser , Satyadev Patel , Andrew Huibers , Igor Volfman
发明人： Jonathan Doan , Regis Grasser , Satyadev Patel , Andrew Huibers , Igor Volfman
IPC分类号： G01B9/02
CPC分类号： G02B26/001 , G02B26/0841
摘要： The invention provides a method and apparatus for evaluating the quality of microelectromechanical devices having deformable and deflectable members using resonation techniques. Specifically, product quality characterized in terms of uniformity of the deformable and deflectable elements is inspected with an optical resonance mapping mechanism on a wafer-level.
摘要翻译： 本发明提供一种用于使用谐振技术来评估具有可变形和可偏转构件的微机电装置的质量的方法和装置。 具体地说，利用晶片级上的光学共振映射机构来检查以可变形和可偏转元件的均匀性为特征的产品质量。
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公开(公告)号：US20060245032A1
公开(公告)日：2006-11-02
申请号：US11110338
申请日：2005-04-19
申请人： Jonathan Doan , Regis Grasser , Satyadev Patel , Andrew Huibers , Igor Volfman
发明人： Jonathan Doan , Regis Grasser , Satyadev Patel , Andrew Huibers , Igor Volfman
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , G02B26/0841
摘要： The invention provides a method and apparatus for evaluating the quality of microelectromechanical devices having deformable and deflectable members using resonation techniques. Specifically, product quality characterized in terms of uniformity of the deformable and deflectable elements is inspected with an optical resonance mapping mechanism on a wafer-level.
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公开(公告)号：US07158279B2
公开(公告)日：2007-01-02
申请号：US10969503
申请日：2004-10-19
申请人： Satyadev Patel , Regis Grasser , Andrew Huibers , Peter Heureux
发明人： Satyadev Patel , Regis Grasser , Andrew Huibers , Peter Heureux
CPC分类号： G02B26/0833 , G02B26/0841 , H04N9/3114 , Y10S359/904
摘要： A micromirror array comprises micromirrors of different properties for use particularly in display systems. Micromirrors of different properties can be arranged within the micromirror array according to a predetermined pattern, or randomly. However, it is advantageous to arrange the micromirrors with different properties within the micromirror array neither in complete order nor complete in random.
摘要翻译： 微镜阵列包括用于特别在显示系统中的不同性质的微镜。 可以根据预定图案或随机地将不同性质的微镜布置在微镜阵列内。 然而，有利的是在微镜阵列内布置具有不同特性的微反射镜，既不是完全顺序的也不是随机完成的。
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公开(公告)号：US20060082856A1
公开(公告)日：2006-04-20
申请号：US10969503
申请日：2004-10-19
申请人： Satyadev Patel , Regis Grasser , Andrew Huibers , Peter Heureux
发明人： Satyadev Patel , Regis Grasser , Andrew Huibers , Peter Heureux
IPC分类号： G02B26/00
CPC分类号： G02B26/0833 , G02B26/0841 , H04N9/3114 , Y10S359/904
摘要： A micromirror array comprises micromirrors of different properties for use particularly in display systems. Micromirrors of different properties can be arranged within the micromirror array according to a predetermined pattern, or randomly. However, it is advantageous to arrange the micromirrors with different properties within the micromirror array neither in complete order nor complete in random.
摘要翻译： 微镜阵列包括用于特别在显示系统中的不同性质的微镜。 可以根据预定图案或随机地将不同性质的微镜布置在微镜阵列内。 然而，有利的是在微镜阵列内布置具有不同特性的微反射镜，既不是完全顺序的也不是随机完成的。
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公开(公告)号：US07630085B2
公开(公告)日：2009-12-08
申请号：US11110557
申请日：2005-04-19
申请人： Regis Grasser , Satyadev Patel , Andrew Huibers
发明人： Regis Grasser , Satyadev Patel , Andrew Huibers
IPC分类号： G01B11/02
CPC分类号： G01B9/02063 , G01B9/02058 , G01J3/453
摘要： The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.
摘要翻译： 本发明提供了一种微结构器件，其包括多个衬底，其中器件的部件形成在衬底上。 为了保持基板之间的间隙的均匀性，提供并分布在间隙中的多个支柱以防止间隙尺寸的减小。 可以通过将支柱结合到微结构的部件来防止间隙尺寸的增加。 或者，可以通过将间隙内的压力维持在微结构将在其中操作的压力以下来防止间隙尺寸的增加。 形成微反射镜和电极的基板的电接触可以通过许多方式制成，例如电接触区域，电接触焊盘和电接触弹簧。
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公开(公告)号：US07085035B2
公开(公告)日：2006-08-01
申请号：US10969502
申请日：2004-10-19
申请人： Andrew Huibers , Satyadev Patel , Peter Heureux , Robert Duboc , Regis Grasser
发明人： Andrew Huibers , Satyadev Patel , Peter Heureux , Robert Duboc , Regis Grasser
CPC分类号： G02B26/0841
摘要： Disclosed herein is a micromirror-based display system having an improved contrast ratio with the deflection of the micromirrors accomplished through one addressing electrode associate with the micromirror.
摘要翻译： 本文公开了一种基于微镜的显示系统，其具有与通过与微镜相关联的一个寻址电极实现的微镜的偏转的改善的对比度。
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公开(公告)号：US20060232785A1
公开(公告)日：2006-10-19
申请号：US11110557
申请日：2005-04-19
申请人： Regis Grasser , Satyadev Patel , Andrew Huibers
发明人： Regis Grasser , Satyadev Patel , Andrew Huibers
IPC分类号： G01B11/02
CPC分类号： G01B9/02063 , G01B9/02058 , G01J3/453
摘要： The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.
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