Invention Application
US20060033050A1 Electron-beam drawing apparatus and electron-beam drawing method
审中-公开
电子束描绘装置和电子束拉制法
- Patent Title: Electron-beam drawing apparatus and electron-beam drawing method
- Patent Title (中): 电子束描绘装置和电子束拉制法
-
Application No.: US11251807Application Date: 2005-10-18
-
Publication No.: US20060033050A1Publication Date: 2006-02-16
- Inventor: Kimiaki Ando , Haruo Yoda , Rikio Tomiyoshi , Masamichi Kawano
- Applicant: Kimiaki Ando , Haruo Yoda , Rikio Tomiyoshi , Masamichi Kawano
- Priority: JP2000-259478 20000829
- Main IPC: G21K5/10
- IPC: G21K5/10

Abstract:
In the case of drawing an oblique figure pattern, when drawing an oblique figure by using a slender rectangular beam, a problem occurs that edge roughness occurs at an oblique-side portion to deteriorate the drawing accuracy. The present invention solves the above problem and provides an electron-beam drawing apparatus and an electron-beam drawing method capable of accurately drawing even an oblique figure. A first rectangular aperture and a second parallelogrammatic aperture are used and a variable parallelogrammatic electron beam formed by two apertures is used to draw a desired pattern on the surface of a sample. Moreover, oblique-side-portion-contour decomposition means is used to draw an oblique-side portion by a variable parallelogram and the inside of an oblique side by a triangle and a quadrangle (rectangle).
Information query