发明申请
US20060037531A1 Furnace purification and metal fluoride crystals grown in a purified furnace
失效
在纯化炉中生长的炉子净化和金属氟化物晶体
- 专利标题： Furnace purification and metal fluoride crystals grown in a purified furnace
- 专利标题（中）： 在纯化炉中生长的炉子净化和金属氟化物晶体
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申请号： US10971315申请日： 2004-10-22
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公开(公告)号： US20060037531A1公开(公告)日： 2006-02-23
- 发明人: Michele Fredholm , Jeffrey Kohli , Nicholas LeBlond , Alexandre Mayolet , Viktoria Pshenitsyna , Pawan Saxena , Paul Schermerhorn
- 申请人： Michele Fredholm , Jeffrey Kohli , Nicholas LeBlond , Alexandre Mayolet , Viktoria Pshenitsyna , Pawan Saxena , Paul Schermerhorn
- 优先权： EP04292065.2 20040820
- 主分类号： C30B11/00
- IPC分类号： C30B11/00 ; C30B17/00 ; C30B9/00 ; C30B21/02 ; C30B28/06
摘要：
The invention is directed to a method for growing metal fluoride crystals suitable for use in below 200 nm optical lithography systems, the method comprising including at least the step of heating a crystal growth furnace to a temperature in the range of 1400-2000° C. to purify the furnace by removal of sulfur and chlorine prior to using the furnace for growing metal fluoride single crystals.
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