发明申请
US20060042547A1 Portable microwave plasma discharge unit 有权
便携式微波等离子体放电单元

  • 专利标题: Portable microwave plasma discharge unit
  • 专利标题(中): 便携式微波等离子体放电单元
  • 申请号: US10931221
    申请日: 2004-09-01
  • 公开(公告)号: US20060042547A1
    公开(公告)日: 2006-03-02
  • 发明人: Sang LeeJay Kim
  • 申请人: Sang LeeJay Kim
  • 主分类号: C23C16/00
  • IPC分类号: C23C16/00
Portable microwave plasma discharge unit
摘要:
A portable microwave plasma discharge unit receives microwaves and a gas flow via a supply line. The portable microwave plasma discharge unit generates plasma from the gas flow and the received microwaves. The portable microwave plasma discharge unit includes a gas flow tube made of a conducting and/or dielectric material and a rod-shaped conductor that is axially disposed in the gas flow tube. The rod-shaped conductor has an end configured to contact a microwave supply conductor of the supply line to receive microwaves and a tapered tip positioned adjacent the outlet portion of the gas flow tube. The tapered tip is configured to focus the microwaves received from the microwave supply conductor to generate plasma from the gas flow.
公开/授权文献
信息查询
0/0