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公开(公告)号：US20060042547A1
公开(公告)日：2006-03-02
申请号：US10931221
申请日：2004-09-01
IPC分类号： C23C16/00
CPC分类号： H05H1/30
摘要： A portable microwave plasma discharge unit receives microwaves and a gas flow via a supply line. The portable microwave plasma discharge unit generates plasma from the gas flow and the received microwaves. The portable microwave plasma discharge unit includes a gas flow tube made of a conducting and/or dielectric material and a rod-shaped conductor that is axially disposed in the gas flow tube. The rod-shaped conductor has an end configured to contact a microwave supply conductor of the supply line to receive microwaves and a tapered tip positioned adjacent the outlet portion of the gas flow tube. The tapered tip is configured to focus the microwaves received from the microwave supply conductor to generate plasma from the gas flow.
摘要翻译： 便携式微波等离子体放电单元经由供电线接收微波和气流。 便携式微波等离子体放电单元从气流和接收的微波产生等离子体。 便携式微波等离子体放电单元包括由导电和/或电介质材料制成的气体流管和轴向设置在气体流管中的棒状导体。 棒状导体具有构造成接触供应线的微波供应导体以接收微波的端部和邻近气体流管出口部分定位的锥形尖端。 锥形尖端被配置为聚焦从微波供应导体接收的微波，以从气流产生等离子体。
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公开(公告)号：US20080093358A1
公开(公告)日：2008-04-24
申请号：US11661063
申请日：2005-08-11
IPC分类号： H05B6/64
CPC分类号： H05B6/802 , H05B2206/045 , H05H1/46 , H05H2001/463
摘要： A portable microwave plasma discharge unit receives microwaves and a gas flow via a supply line. The portable microwave plasma discharge unit generates plasma from the gas flow and the received microwaves. The portable microwave plasma discharge unit includes a gas flow tube made of a conducting and/or dielectric material and a rod-shaped conductor that is axially disposed in the gas flow tube. The rod-shaped conductor has an end configured to contact a microwave supply conductor of the supply line to receive microwaves and a tapered tip positioned adjacent the outlet portion of the gas flow tube. The tapered tip is configured to focus the microwaves received from the microwave supply conductor to generate plasma from the gas flow.
摘要翻译： 便携式微波等离子体放电单元经由供电线接收微波和气流。 便携式微波等离子体放电单元从气流和接收的微波产生等离子体。 便携式微波等离子体放电单元包括由导电和/或电介质材料制成的气体流管和轴向设置在气体流管中的棒状导体。 棒状导体具有构造成接触供应线的微波供应导体以接收微波的端部和邻近气体流管出口部分定位的锥形尖端。 锥形尖端被配置为聚焦从微波供应导体接收的微波，以从气流产生等离子体。
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3.发明申请System and method for controlling a power distribution within a microwave cavity 审中-公开用于控制微波腔内功率分布的系统和方法公开(公告)号：US20060021980A1
公开(公告)日：2006-02-02
申请号：US10902433
申请日：2004-07-30
IPC分类号： H05B6/74
摘要： Systems and methods for controlling a power distribution in a microwave cavity are disclosed. The present invention provides a system that includes a microwave source and a pair of isolators that dissipate retrogressing microwaves that travel toward the microwave source. The isolators are connected to the microwave source. The system also includes a microwave cavity having a pair of inlets disposed on opposite sides of the microwave cavity, a pair of waveguides operatively connected to the inlets to the isolators, respectively; a pair of non-rotating phase shifters operatively connected to the waveguides and the isolators, respectively; a pair of circulators operatively connected to the waveguides and being configured to direct the microwaves to the pair of non-rotating phase shifters, respectively. A power distribution within the microwave cavity is controlled by operation of at least one of the pair of non-rotating phase shifters.
摘要翻译： 公开了一种用于控制微波腔中功率分布的系统和方法。 本发明提供了一种系统，其包括微波源和一对隔离器，其消散向微波源行进的后退微波。 隔离器连接到微波源。 该系统还包括微波空腔，其具有设置在微波腔的相对侧上的一对入口，分别可操作地连接到入口到隔离器的一对波导; 分别可操作地连接到波导和隔离器的一对非旋转移相器; 一对可操作地连接到波导并且被配置为将微波分别引导到一对非旋转移相器的循环器。 微波腔内的功率分布由一对非旋转移相器中的至少一个的操作来控制。
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4.发明申请Plasma nozzle array for providing uniform scalable microwave plasma generation 有权等离子喷嘴阵列，用于提供均匀可扩展的微波等离子体产生公开(公告)号：US20060021581A1
公开(公告)日：2006-02-02
申请号：US10902435
申请日：2004-07-30
CPC分类号： H01J37/32192 , A61L2/14 , H05H1/46 , H05H2001/4622
摘要： Microwave plasma nozzle array systems and methods for configuring the microwave plasma nozzle arrays are disclosed. The microwaves are transmitted to a microwave cavity in a specific manner and form an interference pattern that includes high-energy regions within the microwave cavity. The high-energy regions are controlled by the phases and the wavelengths of the microwaves. A plurality of nozzle elements is provided in the array. Each of the nozzle elements has a portion partially disposed in the microwave cavity and receives a gas for passing therethrough. The nozzle elements receive microwave energy from one of the high-energy regions. Each of the nozzle elements include a rod-shaped conductor having a tip that focuses the microwaves and a plasma is then generated using the received gas.
摘要翻译： 公开了用于配置微波等离子体喷嘴阵列的微波等离子体喷嘴阵列系统和方法。 微波以特定方式传输到微波空腔，并形成包括微波腔内的高能区域的干涉图案。 高能区由微波的相位和波长控制。 阵列中设有多个喷嘴元件。 每个喷嘴元件具有部分地设置在微波腔中的部分并且接收用于穿过其中的气体。 喷嘴元件从高能区域之一接收微波能量。 每个喷嘴元件包括具有聚焦微波的尖端的棒状导体，然后使用接收的气体产生等离子体。
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5.发明申请Microwave plasma nozzle with enhanced plume stability and heating efficiency 有权微波等离子体喷嘴具有增强的羽流稳定性和加热效率公开(公告)号：US20060006153A1
公开(公告)日：2006-01-12
申请号：US10885237
申请日：2004-07-07
IPC分类号： B23K10/00
CPC分类号： H05H1/46 , H05H2001/4622 , H05H2001/463
摘要： Systems and methods for generating relatively cool microwave plasma are disclosed. The present invention provides a microwave plasma nozzle that includes a gas flow tube through which a gas flows, and a rod-shaped conductor that is disposed in the gas flow tube and has a tapered tip near the outlet of the gas flow tube. A portion of the rod-shaped conductor extends into a microwave cavity to receive microwaves passing in the cavity. These received microwaves are focused at the tapered tip to heat the gas into plasma. The microwave plasma nozzle also includes a vortex guide between the rod-shaped conductor and the gas flow tube imparting a helical shaped flow direction around the rod-shaped conductor to the gas flowing through the tube. The microwave plasma nozzle further includes a mechanism for electronically exciting the gas and a shielding mechanism for reducing a microwave power loss through the gas flow tube.
摘要翻译： 公开了用于产生相对较冷的微波等离子体的系统和方法。 本发明提供了一种微波等离子体喷嘴，其包括气体流过的气体流管和设置在气体流管中并且在气体流管的出口附近具有锥形尖端的棒状导体。 棒状导体的一部分延伸到微波腔中以接收通过空腔的微波。 这些接收到的微波聚焦在锥形尖端以将气体加热成等离子体。 微波等离子体喷嘴还包括在棒状导体和气体流动管之间的涡流引导件，其使得围绕棒状导体的螺旋形流动方向对流过管的气体。 微波等离子体喷嘴还包括用于电子激发气体的机构和用于减少通过气体流动管的微波功率损耗的屏蔽机构。
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6.发明申请Plasma Nozzle Array for Providing Uniform Scalable Microwave Plasma Generation 审中-公开用于提供均匀可扩展微波等离子体发生的等离子喷嘴阵列公开(公告)号：US20080073202A1
公开(公告)日：2008-03-27
申请号：US11658356
申请日：2005-07-21
CPC分类号： H01J37/32192 , A61L2/14 , H05H1/46 , H05H2001/4622
摘要： The present invention provides microwave plasma nozzle array systems (10, 70, 230, and 310) and methods for configuring microwave plasma nozzle arrays (37, 99, and 337). The microwaves are transmitted to a microwave cavity (323) in a specific manner and form an interference pattern (66) that includes high-energy regions (69) within the microwave cavity (32). The high-energy regions (69) are controlled by the phases and the wavelengths of the microwaves. A plurality of nozzle elements (36) is provided in the array (37). Each of the nozzle elements (36) has a portion (116) partially disposed in the microwave cavity (32) and receives a gas for passing therethrough. The nozzle elements (36) receive microwave energy from one of the high-energy regions (69). Each of the nozzle elements (36) includes a rod-shaped conductor (114) having a tip (117) that focuses on the microwaves and a plasma (38) is then generated using the received gas.
摘要翻译： 本发明提供微波等离子体喷嘴阵列系统（10,70,230和310）以及用于配置微波等离子体喷嘴阵列（37,99和337）的方法。 微波以特定的方式传送到微波腔（323）并形成包括微波腔（32）内的高能区域（69）的干涉图案（66）。 高能区（69）由微波的相位和波长控制。 在阵列（37）中设置有多个喷嘴元件（36）。 每个喷嘴元件（36）具有部分地布置在微波腔（32）中的部分（116）并且接收用于通过的气体。 喷嘴元件（36）从高能区域（69）之一接收微波能量。 每个喷嘴元件（36）包括具有聚焦在微波上的尖端（117）的棒状导体（114），然后使用所接收的气体产生等离子体（38）。
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7.发明申请Portable microwave plasma systems including a supply line for gas and microwaves 有权便携式微波等离子体系统，包括气体和微波的供应线公开(公告)号：US20060081565A1
公开(公告)日：2006-04-20
申请号：US10931223
申请日：2004-09-01
申请人： Sang Lee , Jay Kim , Togo Kinoshita
发明人： Sang Lee , Jay Kim , Togo Kinoshita
IPC分类号： B23K9/00
CPC分类号： H05H1/46 , H05H2001/4637 , H05H2277/14
摘要： Portable microwave plasma systems including supply lines for providing microwaves and gas flow are disclosed. The supply line includes at least one gas line or conduit and a microwave coaxial cable. A portable microwave plasma system includes a microwave source, a waveguide-to-coax adapter and a waveguide that interconnects the microwave source with the waveguide-to-coax adapter, a portable discharge unit and the supply line. The portable discharge unit includes a gas flow tube coupled to the supply line to receive gas flow and a rod-shaped conductor that is axially disposed in the gas flow tube and has an end configured to receive microwaves from the microwave coaxial cable and a tapered tip positioned adjacent the outlet portion of the gas flow tube. The tapered tip is configured to focus microwave traveling through the rod-shaped conductor and generate plasma from the gas flow.
摘要翻译： 公开了包括用于提供微波和气流的供应线的便携式微波等离子体系统。 供应线包括至少一条气体管线或导管以及微波同轴电缆。 便携式微波等离子体系统包括微波源，波导到同轴电缆适配器和将微波源与波导到同轴电缆适配器，便携式放电单元和电源线相互连接的波导。 便携式排放单元包括连接到供应管线以接收气流的气流管，以及轴向设置在气流管中的棒状导体，并且具有构造成从微波同轴电缆接收微波的端部和锥形尖端 定位在气流管的出口部分附近。 锥形尖端被配置为聚焦通过杆状导体传播的微波并从气流产生等离子体。
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8.发明申请System and method for optimizing data acquisition of plasma using a feedback control module 审中-公开使用反馈控制模块优化等离子体数据采集的系统和方法公开(公告)号：US20060052883A1
公开(公告)日：2006-03-09
申请号：US10935743
申请日：2004-09-08
IPC分类号： G05B13/02
CPC分类号： H01J37/3299 , H01J37/32935
摘要： Method, systems and computer readable media for optimizing data acquisition of microwave plasma are disclosed. The present invention provides a method that includes the steps of selecting an operational condition for a plasma generation system, operating the plasma generation system under the selected operational condition, determining whether a stable plasma is established using a sensing device and acquiring/storing plasma data if the stable plasma is established. The method further includes a step of repeating data acquisition under various operational conditions to establish a database for plasma characterization. The present invention further provides a feedback control module that operates in conjunction with a plasma generating system to automate and optimize the process of data acquisition.
摘要翻译： 公开了用于优化微波等离子体的数据采集的方法，系统和计算机可读介质。 本发明提供了一种方法，其包括以下步骤：选择等离子体产生系统的操作条件，在所选择的操作条件下操作等离子体生成系统，使用感测装置确定是否建立稳定的等离子体，以及如果 建立稳定的等离子体。 该方法还包括在各种操作条件下重复数据采集以建立用于等离子体表征的数据库的步骤。 本发明还提供了一种反馈控制模块，其与等离子体发生系统一起工作，以自动化和优化数据采集过程。
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9.发明申请Microwave Plasma Nozzle With Enhanced Plume Stability And Heating Efficiency 有权微波等离子喷嘴具有增强的羽流稳定性和加热效率公开(公告)号：US20080017616A1
公开(公告)日：2008-01-24
申请号：US11631723
申请日：2005-07-07
IPC分类号： B23K10/00
CPC分类号： H05H1/46 , H05H2001/4622 , H05H2001/463
摘要： Systems and methods for generating relatively cool microwave plasma are disclosed. The present invention provides a microwave plasma nozzle that includes a gas flow tube through which a gas flows, and a rod-shaped conductor that is disposed in the gas flow tube and has a tapered tip near the outlet of the gas flow tube. A portion of the rod-shaped conductor extends into a microwave cavity to receive microwaves passing in the cavity. These received microwaves are focused at the tapered tip to heat the gas into plasma. The microwave plasma nozzle also includes a vortex guide between the rod-shaped conductor and the gas flow tube imparting a helical shaped flow direction around the rod-shaped conductor to the gas flowing through the tube. The microwave plasma nozzle further includes a mechanism for electronically exciting the gas and a shielding mechanism for reducing a microwave power loss through the gas flow tube.
摘要翻译： 公开了用于产生相对较冷的微波等离子体的系统和方法。 本发明提供了一种微波等离子体喷嘴，其包括气体流过的气体流管和设置在气体流管中并且在气体流管的出口附近具有锥形尖端的棒状导体。 棒状导体的一部分延伸到微波腔中以接收通过空腔的微波。 这些接收到的微波聚焦在锥形尖端以将气体加热成等离子体。 微波等离子体喷嘴还包括在棒状导体和气体流动管之间的涡流引导件，其使得围绕棒状导体的螺旋形流动方向对流过管的气体。 微波等离子体喷嘴还包括用于电子激发气体的机构和用于减少通过气体流动管的微波功率损耗的屏蔽机构。
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10.发明申请System and Method for Optimizing Data Acquisition of Plasma Using a Feedback Control Module 审中-公开使用反馈控制模块优化等离子体数据采集的系统和方法公开(公告)号：US20070294037A1
公开(公告)日：2007-12-20
申请号：US11661067
申请日：2005-08-02
IPC分类号： G01N33/48
CPC分类号： H01J37/3299 , H01J37/32935
摘要： Method, systems and computer readable media for optimizing data acquisition of microwave plasma are disclosed. The present invention provides a method that includes the steps of selecting an operational condition for a plasma generation system, operating the plasma generation system under the selected operational condition, determining whether a stable plasma is established using a sensing device and acquiring/storing plasma data if the stable plasma is established. The method further includes a step of repeating data acquisition under various operational conditions to establish a database for plasma characterization. The present invention further provides a feedback control module that operates in conjunction with a plasma generating system to automate and optimize the process of data acquisition.
摘要翻译： 公开了用于优化微波等离子体的数据采集的方法，系统和计算机可读介质。 本发明提供了一种方法，其包括以下步骤：选择等离子体产生系统的操作条件，在所选择的操作条件下操作等离子体生成系统，使用感测装置确定是否建立稳定的等离子体，以及如果 建立稳定的等离子体。 该方法还包括在各种操作条件下重复数据采集以建立用于等离子体表征的数据库的步骤。 本发明还提供了一种反馈控制模块，其与等离子体发生系统一起工作，以自动化和优化数据采集过程。
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