- 专利标题: Lead plating method for GMR head manufacture
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申请号: US11266418申请日: 2005-11-03
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公开(公告)号: US20060048375A1公开(公告)日: 2006-03-09
- 发明人: Chao-Peng Chen , Kevin Lin , Jei-Wei Chang , Kochan Ju , Hui-Chuan Wang
- 申请人: Chao-Peng Chen , Kevin Lin , Jei-Wei Chang , Kochan Ju , Hui-Chuan Wang
- 专利权人: HEADWAY TECHNOLOGIES, INC.
- 当前专利权人: HEADWAY TECHNOLOGIES, INC.
- 主分类号: G11B5/127
- IPC分类号: G11B5/127 ; H04R31/00 ; C25D5/02
摘要:
A major problem in Lead Overlay design for GMR structures is that the magnetic read track width is wider than the physical read track width. This is due to high interfacial resistance between the leads and the GMR layer which is an unavoidable side effect of prior art methods. The present invention uses electroplating preceded by a wet etch to fabricate the leads. This approach requires only a thin protection layer over the GMR layer to ensure that interface resistance is minimal. Using wet surface cleaning avoids sputtering defects and plating is compatible with this so the cleaned surface is preserved Only a single lithography step is needed to define the track since there is no re-deposition involved.
公开/授权文献
- US07111386B2 Lead plating method for GMR head manufacture 公开/授权日:2006-09-26
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