发明申请
- 专利标题： Photoelectric converter, photoelectric conversion device and iron silicide film
- 专利标题（中）： 光电转换器，光电转换装置和硅化铁膜
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申请号： US10542147申请日： 2004-01-16
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公开(公告)号： US20060049478A1公开(公告)日： 2006-03-09
- 发明人: Hiroshi Yamada , Hisao Morooka , Kazuo Nishi
- 申请人： Hiroshi Yamada , Hisao Morooka , Kazuo Nishi
- 优先权： JP2003-008717 20030116
- 国际申请： PCT/JP04/00322 WO 20040116
- 主分类号： H01L31/105
- IPC分类号： H01L31/105 ; H01L31/06 ; H01L31/00
摘要：
A solar battery 10 comprises a metal electrode layer 12, a pin junction 100, and a transparent electrode layer 16 which are successively laminated on a substrate 11 such as a silicon substrate. The pin junction 100 comprises an n-layer 13, an i-layer 14, and a p-layer 15 which are laminated in succession. The i-layer 14 is formed by amorphous iron silicide (FexSiy:H) containing hydrogen atoms. In the i-layer 14, at least a part of the hydrogen atoms contained therein terminate dangling bonds of silicon atoms and/or iron atoms, so that a number of trap levels which may occur in an amorphous iron silicide film can be eliminated, whereby the i-layer 14 exhibits a characteristic as an intrinsic semiconductor layer.
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