Invention Application
US20060057491A1 Coating compositions for use with an overcoated photoresist 审中-公开
用于外涂光致抗蚀剂的涂料组合物

Coating compositions for use with an overcoated photoresist
Abstract:
Compositions (particularly antireflective coating compositions or “ARCs”) are provided that can reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing or via-fill layer. More particularly, the invention relates to organic coating compositions, particularly antireflective coating compositions, that contain a polyester resin component that contains repeat units that comprise phenolic and/or hydroxyalkylcyanurate groups.
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