Invention Application
- Patent Title: Coating compositions for use with an overcoated photoresist
- Patent Title (中): 用于外涂光致抗蚀剂的涂料组合物
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Application No.: US11131908Application Date: 2005-05-17
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Publication No.: US20060057491A1Publication Date: 2006-03-16
- Inventor: Gerald Wayton , Peter Trefonas , Min-Ho Jung
- Applicant: Gerald Wayton , Peter Trefonas , Min-Ho Jung
- Applicant Address: US MA Marlborough
- Assignee: Rohm and Haas Electronic Materials, L.L.C.
- Current Assignee: Rohm and Haas Electronic Materials, L.L.C.
- Current Assignee Address: US MA Marlborough
- Main IPC: G03C1/76
- IPC: G03C1/76

Abstract:
Compositions (particularly antireflective coating compositions or “ARCs”) are provided that can reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing or via-fill layer. More particularly, the invention relates to organic coating compositions, particularly antireflective coating compositions, that contain a polyester resin component that contains repeat units that comprise phenolic and/or hydroxyalkylcyanurate groups.
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