Invention Application
US20060064193A1 Iso/nested cascading trim control with model feedback updates
有权
Iso /嵌套级联调整控制与模型反馈更新
- Patent Title: Iso/nested cascading trim control with model feedback updates
- Patent Title (中): Iso /嵌套级联调整控制与模型反馈更新
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Application No.: US10944463Application Date: 2004-09-20
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Publication No.: US20060064193A1Publication Date: 2006-03-23
- Inventor: Asao Yamashita , Merritt Funk , Daniel Prager
- Applicant: Asao Yamashita , Merritt Funk , Daniel Prager
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Main IPC: G06F19/00
- IPC: G06F19/00
Abstract:
This method includes a method for etch processing that allows the bias between isolated and nested structures/features to be adjusted, correcting for a process wherein the isolated structures/features need to be smaller than the nested structures/features and wherein the nested structures/features need to be reduced relative to the isolated structures/features, while allowing for the critical control of trimming.
Public/Granted literature
- US07209798B2 Iso/nested cascading trim control with model feedback updates Public/Granted day:2007-04-24
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