Invention Application
- Patent Title: Composition and method
- Patent Title (中): 组成和方法
-
Application No.: US11220768Application Date: 2005-09-07
-
Publication No.: US20060069171A1Publication Date: 2006-03-30
- Inventor: Gregory Prokopowicz , Michael Gallagher
- Applicant: Gregory Prokopowicz , Michael Gallagher
- Applicant Address: US MA Marlborough
- Assignee: Rohm and Haas Electronic Materials LLC
- Current Assignee: Rohm and Haas Electronic Materials LLC
- Current Assignee Address: US MA Marlborough
- Main IPC: C08J9/26
- IPC: C08J9/26
Abstract:
Compositions useful in the preparation of porous organic polysilica films, particularly for use in the manufacture of integrated circuits, are provided. Methods of forming such compositions and films are also provided.
Information query
